教學大綱與進度

課程基本資料：

學年期	課號	課程名稱	階段	學分	時數	修	教師	班級	人	撤	備註
111-1	307123	半導體材料檢測技術及原理	1	3.0	3	★	楊重光	生化所 化工所 能源光電外國學生專班	11	0	第A節使用研發中心；化工、生化所和EOMP合開

教學大綱與進度：

教師姓名	楊重光　教師諮商時間(Office Hours)
Email	ckyang@ntut.edu.tw
最後更新時間	2022-06-08 17:00:18
課程大綱	This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials.
課程進度	1-3 : X-ray diffraction (XRD) analysis and its theory fundamentals 4-6 : Scanning Electron Microscope (SEM) analysis and its theory fundamentals 7-9 : Atomic Force Microscope (AFM) analysis and its theory fundamentals 10-11 : Raman spectroscopy analysis and its theory fundamentals 12-13 : Fourier-Transform Infrared Spectroscopy (FTIR) analysis and its theory fundamentals 14-17 : Theory and the applications of x-ray photoelectron spectroscopy (XPS) 18: Practice and results discussion
評量方式與標準	45% Midterm exam 45% Final examination 10% Reports
使用教材、參考書目或其他	【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 Surface analysis-the principal technique, Vickerman, 2010
課程諮詢管道	please use the link to Microsoft Team displayed in the course systems.
備註	please use the link to Microsoft Team displayed in the course systems.