查詢教學大綱與進度

教學大綱與進度

課程基本資料：

學年期課號課程名稱階段學分時數修教師班級人撤備註

110-2 301644 薄膜技術 1 3.0 3 ★ 陳柏均材料所 32 1 含實作

學年期	課號	課程名稱	階段	學分	時數	修	教師	班級	人	撤	備註
110-2	301644	薄膜技術	1	3.0	3	★	陳柏均	材料所	32	1	含實作

教學大綱與進度：

教師姓名陳柏均

Email cpc@mail.ntut.edu.tw

最後更新時間 2022-02-21 09:04:49

課程大綱薄膜科技是當今各式高科技製造業最不可或缺的技術之一，相關技術影響範疇包含電子、光電、半導體製造業、表面工程、高硬度高強度、耐磨抗腐蝕、裝飾與保護等等。薄膜技術種類與相關配合技術繁多，隨產業發展各項技術亦不斷進化，本課程涵蓋相關薄膜成長概論與原理，並搭配實作課程，期望讓學生認識薄膜在科技產業上的應用，並了解其重要性及未來的發展。本課程包含以下主題： 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization) Thin film science and technology have gone through a thorough development which results in numerous new materials and advanced applications. Thin film research shares the knowledge from multi-disciplines, such as materials science, chemistry, solid state physics, mechanics and etc.. This course is an introductory class for students who are interested in thin film technology. Lab or tour session(s) will be provided to promote teaching and learning. The topics will cover: 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization)

課程進度 1) Overview of thin film technology 2) Thin film deposition and layered structure 3) Surface energies 4) Diffusion in solids 5) Stress in thin films 6) Surface kinetic processes 7) Homo-epitaxy and hetero-epitaxy growth 8) Midterm exam 9) Interdiffusion in the films 10) Electromigration 11) Silicide formation and film reactions 12) Reaction in bulk material, thin films and nanowires 13)Term paper presentations 14)Special topics in thin films applications 15)Final review and Q&A Thin Film Lab Sessions (thin film deposition and property measurements)

評量方式與標準 Final Exam 30% Semester Project 30% Lab Assignments 20% Participation 20%

使用教材、參考書目或其他 【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】

使用外文原文書：是
1. Handbook of Thin Film Deposition Processes and Techniques Principles, Methods, Equipment and Applications, Krisna Seshan, 2001 ISBN 978-0-8155-1442-8 (e-book @ NTUT) 2. Electronic Thin-Film Reliability, King-Ning Tu, Cambridge University Press, 2011 ISBN 978-0-5215-1613-6

課程諮詢管道

備註
※「二級」警戒，授課方式說明如下：
● 上課方式：遠距上課 (Microsoft Teams)

[NTUT-Sync]110-2_301644_薄膜技術

教師姓名	陳柏均
Email	cpc@mail.ntut.edu.tw
最後更新時間	2022-02-21 09:04:49
課程大綱	薄膜科技是當今各式高科技製造業最不可或缺的技術之一，相關技術影響範疇包含電子、光電、半導體製造業、表面工程、高硬度高強度、耐磨抗腐蝕、裝飾與保護等等。薄膜技術種類與相關配合技術繁多，隨產業發展各項技術亦不斷進化，本課程涵蓋相關薄膜成長概論與原理，並搭配實作課程，期望讓學生認識薄膜在科技產業上的應用，並了解其重要性及未來的發展。本課程包含以下主題： 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization) Thin film science and technology have gone through a thorough development which results in numerous new materials and advanced applications. Thin film research shares the knowledge from multi-disciplines, such as materials science, chemistry, solid state physics, mechanics and etc.. This course is an introductory class for students who are interested in thin film technology. Lab or tour session(s) will be provided to promote teaching and learning. The topics will cover: 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization)
課程進度	1) Overview of thin film technology 2) Thin film deposition and layered structure 3) Surface energies 4) Diffusion in solids 5) Stress in thin films 6) Surface kinetic processes 7) Homo-epitaxy and hetero-epitaxy growth 8) Midterm exam 9) Interdiffusion in the films 10) Electromigration 11) Silicide formation and film reactions 12) Reaction in bulk material, thin films and nanowires 13)Term paper presentations 14)Special topics in thin films applications 15)Final review and Q&A Thin Film Lab Sessions (thin film deposition and property measurements)
評量方式與標準	Final Exam 30% Semester Project 30% Lab Assignments 20% Participation 20%
使用教材、參考書目或其他	【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】使用外文原文書：是 1. Handbook of Thin Film Deposition Processes and Techniques Principles, Methods, Equipment and Applications, Krisna Seshan, 2001 ISBN 978-0-8155-1442-8 (e-book @ NTUT) 2. Electronic Thin-Film Reliability, King-Ning Tu, Cambridge University Press, 2011 ISBN 978-0-5215-1613-6
課程諮詢管道
備註	※「二級」警戒，授課方式說明如下： ● 上課方式：遠距上課 (Microsoft Teams) [NTUT-Sync]110-2_301644_薄膜技術