查詢教學大綱與進度

教學大綱與進度

課程基本資料：

學年期課號課程名稱階段學分時數修教師班級人撤備註

110-1 294413 半導體製程整合技術 1 3.0 3 ★ 楊重光生化所
化工所
能源光電外國學生專班 27 0 *網路預選限20人,化工所、生化所和EOMP合開

學年期	課號	課程名稱	階段	學分	時數	修	教師	班級	人	撤	備註
110-1	294413	半導體製程整合技術	1	3.0	3	★	楊重光	生化所化工所能源光電外國學生專班	27	0	*網路預選限20人,化工所、生化所和EOMP合開

教學大綱與進度：

教師姓名楊重光

Email ckyang@ntut.edu.tw

最後更新時間 2021-09-17 13:47:43

課程大綱 In this class, the specified semiconductor process is considered as specified unit. By use of the concepts which belong to the chemical engineering unit operations to interpret the analysis / introduction in semiconductor industry and future developing trending. (Also including the theories of VLSI devices) The students who have studied professional chemical engineering courses for many years, can acquire completed and integrated viewpoints in semiconductor process. (Including processes; apparatuses and theories of devices) 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6. Metallization technology 7. Planarization technology 8. PVD and CVD Technology 9. Liner/Barrier/Seed (0.5-0.18um) 10. Metal Fill/ Metal Interconnect (0.5-0.18um) 11. Cu Integration (0.13um and beyond) 12. Gate/Bit Line/Capacitor 13. IC Equipments

課程進度 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6-7. Metallization technology 8. Mid-term examination 9. Planarization technology 10-12. PVD and CVD Technology 13. Liner/Barrier/Seed (0.5-0.18um) 14. Metal Fill/ Metal Interconnect (0.5-0.18um) 15. Cu Integration (0.13um and beyond) 16. Gate/Bit Line/Capacitor 17. IC Equipments 18 Final Exam

評量標準 Mid-term examination 50% Final examination 50%

使用教材、參考書目或其他 【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】

使用外文原文書：是
Introduction to Semiconductor Manufacturing Technology, Second Edition, Author(s): Hong Xiao

*備註本學期原則採實體授課方式；因應疫情警戒標準，本學期教學及授課方式請依照學校網頁所公布之訊息為準：
(https://oaa.ntut.edu.tw/p/404-1008-98622.php?Lang=zh-tw)

●上課方式：分流上課

The students will be assigned the specific seats with the distance of 1.5 m from each other.

●評量方式：
The midterm exam and final exam will be held in the classroom.
●補充說明資訊：
In case of on-line lectures is announced by school authority, we will use the Microsoft Teams with the link described above.

教師姓名	楊重光
Email	ckyang@ntut.edu.tw
最後更新時間	2021-09-17 13:47:43
課程大綱	In this class, the specified semiconductor process is considered as specified unit. By use of the concepts which belong to the chemical engineering unit operations to interpret the analysis / introduction in semiconductor industry and future developing trending. (Also including the theories of VLSI devices) The students who have studied professional chemical engineering courses for many years, can acquire completed and integrated viewpoints in semiconductor process. (Including processes; apparatuses and theories of devices) 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6. Metallization technology 7. Planarization technology 8. PVD and CVD Technology 9. Liner/Barrier/Seed (0.5-0.18um) 10. Metal Fill/ Metal Interconnect (0.5-0.18um) 11. Cu Integration (0.13um and beyond) 12. Gate/Bit Line/Capacitor 13. IC Equipments
課程進度	1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6-7. Metallization technology 8. Mid-term examination 9. Planarization technology 10-12. PVD and CVD Technology 13. Liner/Barrier/Seed (0.5-0.18um) 14. Metal Fill/ Metal Interconnect (0.5-0.18um) 15. Cu Integration (0.13um and beyond) 16. Gate/Bit Line/Capacitor 17. IC Equipments 18 Final Exam
評量標準	Mid-term examination 50% Final examination 50%
使用教材、參考書目或其他	【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】使用外文原文書：是 Introduction to Semiconductor Manufacturing Technology, Second Edition, Author(s): Hong Xiao
*備註	本學期原則採實體授課方式；因應疫情警戒標準，本學期教學及授課方式請依照學校網頁所公布之訊息為準： (https://oaa.ntut.edu.tw/p/404-1008-98622.php?Lang=zh-tw) ●上課方式：分流上課 The students will be assigned the specific seats with the distance of 1.5 m from each other. ●評量方式： The midterm exam and final exam will be held in the classroom. ●補充說明資訊： In case of on-line lectures is announced by school authority, we will use the Microsoft Teams with the link described above.