教學大綱與進度

課程基本資料：

學年期	課號	課程名稱	階段	學分	時數	修	教師	班級	人	撤	備註
114-2	359884	先進半導體設備	1	3.0	3	★	王寶琪	機電所 製科所 半導體學位學程	55	2	機電所.製科所和半導體碩班合開，綜三演講廳

教學大綱與進度：

教師姓名	王寶琪
Email	Steve_Wang@amat.com
最後更新時間	2026-01-28 10:21:50
課程大綱	1.半導體: 5種模組介紹 - 真空、機器手臂、射頻/電漿、真空吸盤/加熱體、氣體儀表盤 - 從理論到應用。 8種半導體機台介紹 Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.期末海報展 1.Semiconductor: 5 Modules – Vacuum, Robot, Plasma/RF, Electric Static Chuck (ESC)/Heater and Gas Panel. 8 Equipment - Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.Factory Touring: Global Technical Learning Center (GTLC) Lab Touring at Hsinchu. 3.Top Executive Sharing: Worthy Horng – Cust Services & Supt, VP of AMAT. 4.Final Exam – Poster Exhibition.
課程進度 (1-16週)	Week 2 Introduction to Course and Applied Materials Week 3 (1) Plasma/RF System and (2) Robot System - from Theory to Application Week 4 Electro-Static-Chuck (ESC)/Heater - from Theory to Application Week 5 Epi and RTP Equipment Week 7 (1) Vacuum System and (2) Gas Panel System - from Theory to Application Week 8 Implant Equipment Week 9 Metal Deposition Product (MDP) Equipment Week 11 (1) The Magic Within and (2) 機不可失 Week 12 Mid-Term Exam Week 13 Etch Equipment Week 14 Global Technical Learning Center (GTLC) Lab Touring Week 15 Process Diagnostic & Control (PDC) Equipment Week 16 Electro-Chemical Deposition (ECD) Equipment Week 18 Final Exam - Poster Exhibition
評量方式與標準	40% Mid-Term Exam + 60% Final Exam - Poster Exhibition
使用教材、參考書目或其他	【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】 使用外文原文書：是 1. VLSI製造技術 by 莊達人. 2. Introduction to Semiconductor Manufacturing Technology, by Hong Xiao. 3. Semiconductor Manufacturing Technology, by Michael Quirk and Julian Serda.
課程諮詢管道	Steve_Wang@amat.com
延伸教學與資源
課程對應SDGs指標	SDG4：優質教育（Quality Education） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
課程是否導入AI	● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
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