查詢教學大綱與進度

教學大綱與進度

課程基本資料：

學年期課號課程名稱階段學分時數修教師班級人撤備註

115-1 366161 半導體材料檢測技術及原理 1 3.0 3 ★ 楊重光化工所
半導體學位學程
能源光電外國學生專班 15 0 化工所、EOMP和創新半導體合開；網路預選限15人

學年期	課號	課程名稱	階段	學分	時數	修	教師	班級	人	撤	備註
115-1	366161	半導體材料檢測技術及原理	1	3.0	3	★	楊重光	化工所半導體學位學程能源光電外國學生專班	15	0	化工所、EOMP和創新半導體合開；網路預選限15人

教學大綱與進度：

教師姓名楊重光

Email ckyang@ntut.edu.tw

最後更新時間 2026-06-05 17:24:43

課程大綱 This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials.

課程進度 1-3 : X-ray diffraction (XRD) analysis and its theory fundamentals 4-6 : Scanning Electron Microscope (SEM) analysis and its theory fundamentals 7-9 : Atomic Force Microscope (AFM) analysis and its theory fundamentals 10-11 : Raman spectroscopy analysis and its theory fundamentals 12-13 : Fourier-Transform Infrared Spectroscopy (FTIR) analysis and its theory fundamentals 14-17 : Theory and the applications of x-ray photoelectron spectroscopy (XPS) 18: Practice and results discussion

評量方式與標準 45% Midterm exam 45% Final examination 10% Reports

使用教材、參考書目或其他 【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】

使用外文原文書：是
Surface analysis-the principal technique, Vickerman, 2010

課程諮詢管道 please use the link to Microsoft Team displayed in the course systems.

延伸教學與資源 ● 混成學習 (Blended Learning)
課程結合實體授課與線上學習（同步視訊／非同步活動）。
Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities).
● 數位科技融入 (Digital Technology Integration)
運用生成式AI、VR/AR、IoT、IRS等新興科技輔助教學與評量。
Utilizes emerging technologies such as Generative AI, VR/AR, IoT, and IRS (Interactive Response Systems) to facilitate teaching and assessment.

課程對應SDGs指標 SDG1：消除貧窮（No Poverty）
SDG2：消除飢餓（Zero Hunger）
SDG3：良好健康和福祉（Good Health and Well-being）
SDG4：優質教育（Quality Education）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG10：減少不平等（Reduced Inequalities）
SDG11：永續城市與社區（Sustainable Cities and Communities）
SDG12：負責任的消費與生產（Responsible Consumption and Production）
SDG17：夥伴關係（Partnerships for the Goals）

課程是否導入AI ● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process）
● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）

備註 please use the link to Microsoft Team displayed in the course systems.

教師姓名	楊重光
Email	ckyang@ntut.edu.tw
最後更新時間	2026-06-05 17:24:43
課程大綱	This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials.
課程進度	1-3 : X-ray diffraction (XRD) analysis and its theory fundamentals 4-6 : Scanning Electron Microscope (SEM) analysis and its theory fundamentals 7-9 : Atomic Force Microscope (AFM) analysis and its theory fundamentals 10-11 : Raman spectroscopy analysis and its theory fundamentals 12-13 : Fourier-Transform Infrared Spectroscopy (FTIR) analysis and its theory fundamentals 14-17 : Theory and the applications of x-ray photoelectron spectroscopy (XPS) 18: Practice and results discussion
評量方式與標準	45% Midterm exam 45% Final examination 10% Reports
使用教材、參考書目或其他	【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】使用外文原文書：是 Surface analysis-the principal technique, Vickerman, 2010
課程諮詢管道	please use the link to Microsoft Team displayed in the course systems.
延伸教學與資源	● 混成學習 (Blended Learning) 課程結合實體授課與線上學習（同步視訊／非同步活動）。 Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities). ● 數位科技融入 (Digital Technology Integration) 運用生成式AI、VR/AR、IoT、IRS等新興科技輔助教學與評量。 Utilizes emerging technologies such as Generative AI, VR/AR, IoT, and IRS (Interactive Response Systems) to facilitate teaching and assessment.
課程對應SDGs指標	SDG1：消除貧窮（No Poverty） SDG2：消除飢餓（Zero Hunger） SDG3：良好健康和福祉（Good Health and Well-being） SDG4：優質教育（Quality Education） SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG10：減少不平等（Reduced Inequalities） SDG11：永續城市與社區（Sustainable Cities and Communities） SDG12：負責任的消費與生產（Responsible Consumption and Production） SDG17：夥伴關係（Partnerships for the Goals）
課程是否導入AI	● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process） ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
備註	please use the link to Microsoft Team displayed in the course systems.