查詢教學大綱與進度

教學大綱與進度

課程基本資料：

學年期課號課程名稱階段學分時數修教師班級人撤備註

113-2 343002 半導體製程整合技術 1 2.0 2 ★ 楊重光化工所
能源光電外國學生專班 15 0 網路預選限15人(研究所)；化工所EOMP合開

學年期	課號	課程名稱	階段	學分	時數	修	教師	班級	人	撤	備註
113-2	343002	半導體製程整合技術	1	2.0	2	★	楊重光	化工所能源光電外國學生專班	15	0	網路預選限15人(研究所)；化工所EOMP合開

教學大綱與進度：

教師姓名楊重光　教師諮商時間(Office Hours)

Email ckyang@ntut.edu.tw

最後更新時間 2024-12-11 16:43:54

課程大綱 In this class, the specified semiconductor process is considered as specified unit. By use of the concepts which belong to the chemical engineering unit operations to interpret the analysis / introduction in semiconductor industry and future developing trending. (Also including the theories of VLSI devices) The students who have studied professional chemical engineering courses for many years, can acquire completed and integrated viewpoints in semiconductor process. (Including processes; apparatuses and theories of devices) 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6. Metallization technology 7. Planarization technology 8. PVD and CVD Technology 9. Liner/Barrier/Seed (0.5-0.18um) 10. Metal Fill/ Metal Interconnect (0.5-0.18um) 11. Cu Integration (0.13um and beyond) 12. Gate/Bit Line/Capacitor 13. IC Equipments

課程進度 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6-7. Metallization technology 8. Mid-term examination 9. Planarization technology 10-12. PVD and CVD Technology 13. Liner/Barrier/Seed (0.5-0.18um) 14. Metal Fill/ Metal Interconnect (0.5-0.18um) 15. Cu Integration (0.13um and beyond) 16. Gate/Bit Line/Capacitor 17. IC Equipments 18 Final Exam

評量方式與標準 Mid-term examination 50% Final examination 50%

使用教材、參考書目或其他 【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】

使用外文原文書：是
Introduction to Semiconductor Manufacturing Technology, Second Edition, Author(s): Hong Xiao

課程諮詢管道 https://myweb.ntut.edu.tw/~ckyang/

課程對應SDGs指標 SDG4：優質教育（Quality Education）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG10：減少不平等（Reduced Inequalities）
SDG12：負責任的消費與生產（Responsible Consumption and Production）

課程是否導入AI

備註
We will give the lectures on line in case of outbreak of COVID. Please use the Microsoft TEAM preset for the course.

教師姓名	楊重光　教師諮商時間(Office Hours)
Email	ckyang@ntut.edu.tw
最後更新時間	2024-12-11 16:43:54
課程大綱	In this class, the specified semiconductor process is considered as specified unit. By use of the concepts which belong to the chemical engineering unit operations to interpret the analysis / introduction in semiconductor industry and future developing trending. (Also including the theories of VLSI devices) The students who have studied professional chemical engineering courses for many years, can acquire completed and integrated viewpoints in semiconductor process. (Including processes; apparatuses and theories of devices) 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6. Metallization technology 7. Planarization technology 8. PVD and CVD Technology 9. Liner/Barrier/Seed (0.5-0.18um) 10. Metal Fill/ Metal Interconnect (0.5-0.18um) 11. Cu Integration (0.13um and beyond) 12. Gate/Bit Line/Capacitor 13. IC Equipments
課程進度	1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6-7. Metallization technology 8. Mid-term examination 9. Planarization technology 10-12. PVD and CVD Technology 13. Liner/Barrier/Seed (0.5-0.18um) 14. Metal Fill/ Metal Interconnect (0.5-0.18um) 15. Cu Integration (0.13um and beyond) 16. Gate/Bit Line/Capacitor 17. IC Equipments 18 Final Exam
評量方式與標準	Mid-term examination 50% Final examination 50%
使用教材、參考書目或其他	【遵守智慧財產權觀念，請使用正版教科書，不得使用非法影印教科書】使用外文原文書：是 Introduction to Semiconductor Manufacturing Technology, Second Edition, Author(s): Hong Xiao
課程諮詢管道	https://myweb.ntut.edu.tw/~ckyang/
課程對應SDGs指標	SDG4：優質教育（Quality Education） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG10：減少不平等（Reduced Inequalities） SDG12：負責任的消費與生產（Responsible Consumption and Production）
課程是否導入AI
備註	We will give the lectures on line in case of outbreak of COVID. Please use the Microsoft TEAM preset for the course.