| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 6505101 | 光電半導體原理與製程技術 | Optical Semiconductor Principles and Process Technologies | 3.0 | 3 |
| 中文概述 Chinese Description | 1.半導體材料與理論2. 微影技術3. 銅電鍍技術4. CMP製程5. 氧化擴散6. 濕式清潔7.乾式蝕刻8.CVD製程9. PVD製程10. Implanter | |||
| 英文概述 English Description | The course is including: 1. Semiconductor Materials and Band Theory, 2. Photo- lithography, 3. Copper (Cu) Electroplate Technique, 4.Chemical Mechanical Polishing (CMP), 5. Thermal Process- Oxidation, Diffusion, 6. Wet Clean and Etch Process, 7. Dry Etching Technique. 8. Chemical Vapor Deposition (CVD), 9. Physical Vapor Deposition (PVD) and 10. Ion Implantation. | |||
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