課 程 概 述
Course Description

課程編碼
Course Code
中文課程名稱
Course Name (Chinese)
英文課程名稱
Course Name (English)
總學分數
Credits
總時數
Hours
6505046 表面分析技術及應用 Surface Analysis Techniques and Application 3.0 3
中文概述
Chinese Description
介面反應等與近代高科技技術,如鍍膜工程,表面處理,腐蝕,磨潤,微機電,感測器,半導體技術等息息相關,且日益重要。表面分析是原子層次的相關研究,它包括振動,電子或離子頻譜分,微技術等之應用。主要的項目包含,表面形貌觀察,成份分析(光譜分析,質譜分,EDX),結構分析,鍵結分析,表面粗糙度,膜厚附著力,內應力等膜之特性分析
英文概述
English Description
Surface phenomena and processes occurring at interface are becoming inceasingly importamt in a wide variety of industrial applications including the areas of films coating surface treatments, conclusion, triobology, microelectronics, sensors and semi-conductor technologies. Accompanyind this is an ever-growing need for surface characterization allowing better difinition of processes occurring at a microscopic level. Surface analysis is the use of vibration, electron orion spectroscopic and microscopic techniques for the study of material at the atomic level, it includes SEM,AFM,XRD,EDX,ESCA,XPS,AES,Raman Spectrum,and FTIR analysis.

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