| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 4505610 | 進階半導體與光電廠務設施 | Advanced course on facility system of semiconductor and photonic fabrication plants. | 3.0 | 3 |
| 中文概述 Chinese Description | 本課程為半導體與光電廠務設進階課程, 主要針對半導體與光電廠務設施作深入的論述，課程包含廠務設施的九大系統：冰水機系統、排氣系統、電力監控系統、壓縮空氣系統、氮氣系統、純水系統、真空系統、製程冷卻水系統及外氣空調系統。期使修習本課程之學生有一和實務聯結之機會，並和理論作相相互映證。有校外教學且學生必需完成一小型計劃. | |||
| 英文概述 English Description | This advanced course aims to provide students a broad scope of hand-on knowledge on the facility system of a semiconductor or photonic fabrication factory. The facility system includes nine sub-systems: chilled water system, exhaust air system, compressed air system, process cooling water (PCW) system, vacuum system, ultra pure water (UPW) system, power and monitoring system, nitrogen system and make-up air system. Course material is basically based on and closely linked with field operational experience. A factory visit tour will be arranged. A mini-project will be carried by participating students. | |||
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