課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
---|---|---|---|---|
4504907 | 真空設備專論 | Vacuum Facilites | 3.0 | 3 |
中文概述 Chinese Description | 近年來由於台灣在半導體、平面顯示器、光電、薄膜、低溫冷凍、生物科技及微奈米技術等產業的蓬勃發展,因而帶動了真空設備相關產業,進而對真空科技及其專業人才需求日殷。本課程將針對上述產業所使用的相關真空設備進行講解及討論,包含有真空蒸鍍系統、真空濺鍍系統、真空冷凍乾燥系統、電漿蝕刻真空系統、真空熱處理系統、表面分析技術等,將使學生具備真空設備理論及實務的相關知識與技能。 | |||
英文概述 English Description | The vacuum industry is growing fast in the past two decades because of the highly growing of the high-tech industries including semiconductor, optics-electrics, communication, MEMS, and nano-technology. Therefore, a lot of students need to know the vacuum system described previously. This program will introduce vacuum systems including vacuum evaporating system, vacuum sputtering system, vacuum drying system, vacuum plasma etching system, surface analysis. |
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