| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 4005037 | 表面分析 | Surface Analysis | 3.0 | 3 |
| 中文概述 Chinese Description | 先修課程：負責教授同意。表面現象、介面反應等與近代高科技技術，如鍍膜工程、表面處理、腐蝕、磨潤、微機電、感測器、半導體技術等息息相關，且日益重要。表面分析是原子層次的相關研究，它包括振動、電子或離子頻譜分析、微技術等之應用。主要的項目包含：表面形貌觀察（SEM,BSEM,AFM）、成分分析（光譜分析、質譜分析、EDX）、結構分析（XRD,AES,ESCA,XPS）、鍵結分析（Raman光譜,FTIR）、表面粗糙度、膜厚、附著力、內應力等膜之特性分析。 | |||
| 英文概述 English Description | Surface phenomena and processes occurring at interface are becoming increasingly important in a wide variety of industrial applications including the areas of films coating surface treatments, conclusion, tribology, microelectronics, sensors and semi-conductor technologies. Accompanying this is an ever-growing need for surface characterization allowing better definition of processes occurring at a microscopic level. Surface analysis is the use of vibration, electron or ion spectroscopic and microscopic techniques for the study of material at the atomic level, it includes SEM, AFM, XRD, EDX, ESCA, XPS, AES, Raman Spectrum, and FTIR analysis. | |||
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