| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 3314132 | 薄膜科學與工程 | Introduction to Thin Film Science and Engineering | 3.0 | 3 |
| 中文概述 Chinese Description | 課程內容包含薄膜材料科學，真空科學與技術，薄膜蒸鍍製程，放電、電漿、離子與表面作用，物理氣相沈積，化學氣相沈積，基材表面與薄膜成核，薄膜結構，薄膜性質測試，薄膜之相互擴散、反應與轉換，薄膜之機械性質。 | |||
| 英文概述 English Description | 1. Thin film materials science 2. Vacuum science and technology 3. Thin film evaporation processes 4. Discharge, plasma, and ion-surface interaction 5. Plasma and ion beam processing of thin films 6. Chemical vapor deposition 7. Substrate surfaces and thin film nucleation 8. Film structure 9. Characterization of thin films and surface 10. Interdiffusion, reactions, and transformations in thin films 11. Mechanical properties of thin films | |||
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