課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
---|---|---|---|---|
3314119 | 表面分析技術 | Surface Analysis Techniques | 2.0 | 2 |
中文概述 Chinese Description | 本課程介紹表面基本構造,表面物理及化學現象,真空基本原理。其次探討電子束與材料間的相互作用,以為表面分析之基礎,再討論各種表面分析之方法SEM、Auger電子顯微鏡、二次離子質譜儀,原子力顯微鏡。 | |||
英文概述 English Description | This course firstly gives an introduction on the basic surface structure and surface physical and chemical pheomena, and the priciples of vacuum. Electron beam and specimen interactions will be given as the basic for surface analysis techniques. Then the various surface techniques such as SEM, Auger electron spectroscopy, secondary ion mass spectrometry and atomic force microscopy will be discussed. |
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