| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 5605101 | 先進半導體設備 | Equipment – Advanced Technologies of Semiconductor | 3.0 | 3 |
| 中文概述 Chinese Description | 1.半導體: 5種模組介紹 - 真空、機器手臂、射頻/電漿、真空吸盤/加熱體、氣體儀表盤 - 從理論到應用。 8種半導體機台介紹 Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.期末海報展 | |||
| 英文概述 English Description | 1.Semiconductor: 5 Modules – Vacuum, Robot, Plasma/RF, Electric Static Chuck (ESC)/Heater and Gas Panel. 8 Equipment - Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.Factory Touring: Global Technical Learning Center (GTLC) Lab Touring at Hsinchu. 3.Top Executive Sharing: Worthy Horng – Cust Services & Supt, VP of AMAT. 4.Final Exam – Poster Exhibition. | |||
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