| 課程編碼 Course Code | 中文課程名稱 Course Name (Chinese) | 英文課程名稱 Course Name (English) | 總學分數 Credits | 總時數 Hours |
|---|---|---|---|---|
| 3205027 | 半導體材料檢測技術及原理 | Characterization Methods for Semiconductor Materials | 3.0 | 3 |
| 中文概述 Chinese Description | 本課程將探討半導體材料之表面化學性質之分析技巧、以及界面和分子間引力之量測方法、表面形態分析、晶相結構分析以及電磁性質量測之技術和其原理。並配合半導體旋轉塗佈機和濺鍍機所備製之薄膜﹐實際操作FTIR顯微鏡、原子力顯微鏡、微量材料流變儀。 | |||
| 英文概述 English Description | This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials. | |||
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