Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Fall Semester
Year 2025 350241 Nano Materials and Technology 1 3.0 3 ★ Wen-Ya Lee GCEB
半導體學位學程 15 0 網路預選限25人(研究所);大四化工所合開

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2025	350241	Nano Materials and Technology	1	3.0	3	★	Wen-Ya Lee	GCEB 半導體學位學程	15	0	網路預選限25人(研究所);大四化工所合開

Course Plan：

Instructor Wen-Ya Lee　Office Hours

Email wenyalee@ntut.edu.tw

Last Updated 2025-05-23 10:18:21

Course Objective 奈米科技與半導體製程技術在近年來受到極大的重視，因此在本課程將介紹半導體基礎與最新的奈米技術，內容包含有基礎電子電路學與半導體製程(包含FinFET與GAA介紹)，以及奈米材料(如奈米碳管、石墨烯、二維奈米材料等)，期許可以帶給同學當今最新的奈米化技術與半導體相關之科技知識。 Nanotechnology and semiconductor manufacturing processes have received significant attention in recent years. Therefore, this course will introduce the fundamentals of semiconductors and the latest nanotechnology. The content includes basic electronic circuitry and semiconductor manufacturing processes, as well as nanomaterials such as carbon nanotubes, graphene, and two-dimensional nanomaterials. The aim is to provide students with the latest knowledge in nanotechnology and semiconductor-related technologies.

Course Schedule Week 1: Introduction to Semiconductor Industry Chain Week 2: Nanotechnology & Semiconductor Physics Week 3: Basic Electrical Engineering Week 4: Semiconductor Fabrication: Silicon Wafer Processing Week 5: Semiconductor Fabrication: Oxidation and Diffusion Week 6: Semiconductor Fabrication: Photolithography Week 7: Semiconductor Fabrication: Ion Implantation and Plasma Week 8: Semiconductor Fabrication: Etching Processes Week 9: Midterm Exam Week 10: Semiconductor Fabrication: Chemical Vapor Deposition (CVD) Week 11: Semiconductor Fabrication: Metallization and Physical Vapor Deposition (PVD) Week 12: Semiconductor Fabrication: Chemical Mechanical Polishing (CMP) Week 13: Semiconductor Fabrication: Integration and IC Process Technology Week 14: Semiconductor Fabrication: Advanced Semiconductor Devices Week 15: Nanotechnology: Fullerenes Week 16: Nanotechnology: Carbon Nanotubes Week 17: Nanotechnology: Graphene Week 18: Final Exam 第一周半導體產業鏈與奈米科技介紹第二周半導體物理第三周基本電學第四周半導體製程: 矽晶圓處理第五周半導體製程: 氧化擴散第六周半導體製程: 黃光微影第七周半導體製程: 離子佈植與電漿第八周半導體製程: 蝕刻製程第九周期中考第十周半導體製程: 化學氣相沉積CVD 第十一周半導體製程: 金屬化製程與物理氣相沉積 PVD 第十二周半導體製程: 化學機械研磨CMP 第十三周半導體製程: 半導體製程整合 & IC製程技術第十四周半導體製程: 先進半導體元件第十五周奈米科技: 富勒烯第十六周奈米科技: 奈米碳管第十七周奈米科技: 石墨烯第十八周期末考

Evaluation and grading policy 小考與平時表現 Quiz: 30% 期中考 Midterm 30% 期末考 Final term 40%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
1. 蕭宏, "半導體製程技術導論"`, 第三版, 全華圖書 2. UMESH K. MISHRA, JASPRIT SINGH, "Semiconductor Device Physics and Design", Springer

The access to curricular consultation 可以用email聯絡或是在google classroom上討論。

The course corresponds to the SDGs SDG6：潔淨水與衛生（Clean Water and Sanitation）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG12：負責任的消費與生產（Responsible Consumption and Production）

Does the course incorporate AI AI5：深入探討AI的原理與應用（Explore the principles and applications of AI in depth）

Note
授課方式會使用google classroom，若因疫情有任何變化，會在google classroom上跟大家說明

Instructor	Wen-Ya Lee　Office Hours
Email	wenyalee@ntut.edu.tw
Last Updated	2025-05-23 10:18:21
Course Objective	奈米科技與半導體製程技術在近年來受到極大的重視，因此在本課程將介紹半導體基礎與最新的奈米技術，內容包含有基礎電子電路學與半導體製程(包含FinFET與GAA介紹)，以及奈米材料(如奈米碳管、石墨烯、二維奈米材料等)，期許可以帶給同學當今最新的奈米化技術與半導體相關之科技知識。 Nanotechnology and semiconductor manufacturing processes have received significant attention in recent years. Therefore, this course will introduce the fundamentals of semiconductors and the latest nanotechnology. The content includes basic electronic circuitry and semiconductor manufacturing processes, as well as nanomaterials such as carbon nanotubes, graphene, and two-dimensional nanomaterials. The aim is to provide students with the latest knowledge in nanotechnology and semiconductor-related technologies.
Course Schedule	Week 1: Introduction to Semiconductor Industry Chain Week 2: Nanotechnology & Semiconductor Physics Week 3: Basic Electrical Engineering Week 4: Semiconductor Fabrication: Silicon Wafer Processing Week 5: Semiconductor Fabrication: Oxidation and Diffusion Week 6: Semiconductor Fabrication: Photolithography Week 7: Semiconductor Fabrication: Ion Implantation and Plasma Week 8: Semiconductor Fabrication: Etching Processes Week 9: Midterm Exam Week 10: Semiconductor Fabrication: Chemical Vapor Deposition (CVD) Week 11: Semiconductor Fabrication: Metallization and Physical Vapor Deposition (PVD) Week 12: Semiconductor Fabrication: Chemical Mechanical Polishing (CMP) Week 13: Semiconductor Fabrication: Integration and IC Process Technology Week 14: Semiconductor Fabrication: Advanced Semiconductor Devices Week 15: Nanotechnology: Fullerenes Week 16: Nanotechnology: Carbon Nanotubes Week 17: Nanotechnology: Graphene Week 18: Final Exam 第一周半導體產業鏈與奈米科技介紹第二周半導體物理第三周基本電學第四周半導體製程: 矽晶圓處理第五周半導體製程: 氧化擴散第六周半導體製程: 黃光微影第七周半導體製程: 離子佈植與電漿第八周半導體製程: 蝕刻製程第九周期中考第十周半導體製程: 化學氣相沉積CVD 第十一周半導體製程: 金屬化製程與物理氣相沉積 PVD 第十二周半導體製程: 化學機械研磨CMP 第十三周半導體製程: 半導體製程整合 & IC製程技術第十四周半導體製程: 先進半導體元件第十五周奈米科技: 富勒烯第十六周奈米科技: 奈米碳管第十七周奈米科技: 石墨烯第十八周期末考
Evaluation and grading policy	小考與平時表現 Quiz: 30% 期中考 Midterm 30% 期末考 Final term 40%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes 1. 蕭宏, "半導體製程技術導論"`, 第三版, 全華圖書 2. UMESH K. MISHRA, JASPRIT SINGH, "Semiconductor Device Physics and Design", Springer
The access to curricular consultation	可以用email聯絡或是在google classroom上討論。
The course corresponds to the SDGs	SDG6：潔淨水與衛生（Clean Water and Sanitation） SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG12：負責任的消費與生產（Responsible Consumption and Production）
Does the course incorporate AI	AI5：深入探討AI的原理與應用（Explore the principles and applications of AI in depth）
Note	授課方式會使用google classroom，若因疫情有任何變化，會在google classroom上跟大家說明