Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	345518	Advanced IC Fabrication Process	1	3.0	3	★	Yuan-Jen Chang	GME GMT IMMA 半導體學位學程	50	0	機電.製科.半導體專班.外生班合開；限50人

Course Plan：

Instructor	Yuan-Jen Chang　Office Hours
Email	yjchang@ntut.edu.tw
Last Updated	2024-12-18 08:37:37
Course Objective	先修課程：負責教授同意。 本課程著重於IC製程技術之學習。課程內容包括：IC絕緣技術、模組製程技術、導線技術、整合工程技術、SOC技術及半導體奈米元件技術等。 A study on advanced IC process. The contents cover IC isolation technology, module process, interconnection line process, process integration, SOC applications and CMOS nano device engineering etc.
Course Schedule	Week Content Week 1 導論 (Introduction) Week 2 積體電路生產簡介 (Introduction of IC process) Week 3 半導體材料 (Semiconductor Materials) Week 4 半導體材料 (Semiconductor Materials) Week 5 晶圓製造 (Wafer Fabrication Process) Week 6 熱製程 (Thermal Processing) Week 7 微影製程 (Lithography) Week 8 微影製程 (Lithography) Week 9 微影製程 (Lithography) / Mid-term Exam Week 10 蝕刻 (Etching) Week 11 蝕刻 (Etching) Week 12 離子佈植 (Ion Implantation) Week 13 離子佈植 (Ion Implantation) Week 14 物理氣相沉積 (PVD) Week 15 物理氣相沉積 (PVD) Week 16 化學氣相沉積 (CVD) Week 17 化學機械研磨 (CMP) Week 18 Final Exam
Evaluation and grading policy	Mid-term 50% Final Exam 50%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No Introduction to semiconductor manufacturing technology, Xiao Hong, SPIE, c2012 半導體製程技術導論(第三版), 蕭宏 著, 全華書局，103年8月
The access to curricular consultation	Prof. Yuan-Jen Chang Office: Complex Building, room 221 Phone: 02-27712171 ext. 2021 Email: yjchang@mail.ntut.edu.tw
The course corresponds to the SDGs	SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Note