Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2025 345485 Special Topics in VLSI Processing Technology 1 3.0 3 ★ Hsiao-Hsuan HSU GMMR
半導體學位學程
IDEOM 45 0 EMI

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	345485	Special Topics in VLSI Processing Technology	1	3.0	3	★	Hsiao-Hsuan HSU	GMMR 半導體學位學程 IDEOM	45	0	EMI

Course Plan：

Instructor Hsiao-Hsuan HSU　Office Hours

Email hhhsu@mail.ntut.edu.tw

Last Updated 2024-12-16 23:11:48

Course Objective This course will introduce the semiconductor process, including device basics, process flow, manufacturing, and process integration. The students will gain a thorough overview on semiconductor manufacturing technology before working in industry. Language: English

Course Schedule 1. Introduction of IC Fabrication 2. Semiconductor Basics 3. Wafer Manufacturing and Epitaxy 4. Oxidation and Thermal Processes 5. CVD and PVD 6. Metallization 7. Photolithography 8. Process Integration

Evaluation and grading policy Mid-term Exam 40% Final Exam 40% Class Participation: 20% (Homework, Classwork, Attendance)

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
Michael Quirk, Julian Serda, "Semiconductor Manufacturing Technology", Pearson, 2013 ISBN: 978-986-154-117-4

The access to curricular consultation email: hhhsu@mail.ntut.edu.tw

The course corresponds to the SDGs SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Note
如有加退選簽核或課程問題請 email: hhhsu@mail.ntut.edu.tw

Instructor	Hsiao-Hsuan HSU　Office Hours
Email	hhhsu@mail.ntut.edu.tw
Last Updated	2024-12-16 23:11:48
Course Objective	This course will introduce the semiconductor process, including device basics, process flow, manufacturing, and process integration. The students will gain a thorough overview on semiconductor manufacturing technology before working in industry. Language: English
Course Schedule	1. Introduction of IC Fabrication 2. Semiconductor Basics 3. Wafer Manufacturing and Epitaxy 4. Oxidation and Thermal Processes 5. CVD and PVD 6. Metallization 7. Photolithography 8. Process Integration
Evaluation and grading policy	Mid-term Exam 40% Final Exam 40% Class Participation: 20% (Homework, Classwork, Attendance)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Michael Quirk, Julian Serda, "Semiconductor Manufacturing Technology", Pearson, 2013 ISBN: 978-986-154-117-4
The access to curricular consultation	email: hhhsu@mail.ntut.edu.tw
The course corresponds to the SDGs	SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Note	如有加退選簽核或課程問題請 email: hhhsu@mail.ntut.edu.tw