Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	342929	Introduction to semiconductor manufacturing technology	1	3.0	3	★	Mei-Hsin Chen	GEOE IEECSG 半導體學位學程	15	0	Course jointly offered with Electro-Optical Engineering Dept.

Course Plan：

Instructor	Mei-Hsin Chen　Office Hours
Email	mhchen@mail.ntut.edu.tw
Last Updated	2024-12-20 17:39:02
Course Objective	導論、積體電路生產介紹、半導體基礎、晶圓製造、加熱製程、微影蝕刻、電漿的基礎原理、離子佈植、化學氣相沉積與介電質薄膜、金屬化製程、化學機械研磨、製程整合、CMOS 製程 Introduction、Introduction to IC Fabrication、Semiconductor Basics、 Wafer Manufacturing、Thermal Processes、Photolithography and Etch、 Plasma Basics、Ion Implantation、CVD and Dielectric Thin Film、 Metallization、CMP 、Process Integration、CMOS Processes
Course Schedule	Introduction to IC Fabrication ( 1 week ) Semiconductor Basics ( 2 weeks ) Wafer Manufacturing ( 1 week ) Thermal Processes ( 2 weeks ) Photolithography and Etch ( 1 week ) Plasma Basics ( 2 weeks ) Ion Implantation ( 1 week ) CVD and Dielectric Thin Film ( 2 weeks ) Metallization ( 1 week ) CMP ( 1 week ) Process Integration ( 1 week ) CMOS Processes ( 1 week )
Evaluation and grading policy	Attendance : 10 % Midterm: 30 % ( close book ) Final term：30 % (close book ) Presentation：30 % (15 minutes presentation per person)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Introduction to semiconductor manufacturing technology
The access to curricular consultation	Please contact with TA.
The course corresponds to the SDGs	SDG4：優質教育（Quality Education）
Note