Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2025 342421 Plasma Engineering 1 3.0 3 ★ CHAOCHIN SU GOPM 14 0 　

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	342421	Plasma Engineering	1	3.0	3	★	CHAOCHIN SU	GOPM	14	0

Course Plan：

Instructor CHAOCHIN SU　Office Hours

Email f10913@ntut.edu.tw

Last Updated 2024-12-17 13:47:53

Course Objective 講述有關低溫電漿的特徵、性能及有機高分子纖維、生醫素材方面的應用。因高分子表面的改質，使濕潤性、接著性、染色性、帶電性、印刷性等獲致改善，附與高機能功能性。並針對處理時的條件，包括氣體的種類、真空度、壓力、功率、時間、流量等因素，探討對高分子素材表面改質的影響和效果。配合SEM、ESCA、接觸角等儀器的分析、觀測高分子表面構造的變化及成分的變異，以研究高分子表面的改質。

Course Schedule Topic Field Major Topic 1 Principle Introduction 2 • Gas-1 • Gas-2 3 • Gas Phase Collision Processes-1 • Gas Phase Collision Processes-2 4 • Plasma • DC Glow Discharge • RF Discharge, Plasma Reactors and System Mid Examination 5 •Application 6 • Sputtering 7 • Film Deposition 8 • Etching Oral Presentation

Evaluation and grading policy Mid Examination: 40% Presentation: 40% Others 20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
Text Books: (1) Glow Discharge Processes, Brian Chapman John Wiley & Sons, 1980. (2) Cold Plasma in Materials Fabrication (From Fundamentals to Applications, Alfred Grill, IEEE Press, 1993 (3) Film Deposition by Plasma Techniques, Mitsuhara Konuma, Springer-Verlag, 1992

The access to curricular consultation Line Group Discussion

The course corresponds to the SDGs SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG17：夥伴關係（Partnerships for the Goals）

Note
　

Instructor	CHAOCHIN SU　Office Hours
Email	f10913@ntut.edu.tw
Last Updated	2024-12-17 13:47:53
Course Objective	講述有關低溫電漿的特徵、性能及有機高分子纖維、生醫素材方面的應用。因高分子表面的改質，使濕潤性、接著性、染色性、帶電性、印刷性等獲致改善，附與高機能功能性。並針對處理時的條件，包括氣體的種類、真空度、壓力、功率、時間、流量等因素，探討對高分子素材表面改質的影響和效果。配合SEM、ESCA、接觸角等儀器的分析、觀測高分子表面構造的變化及成分的變異，以研究高分子表面的改質。
Course Schedule	Topic Field Major Topic 1 Principle Introduction 2 • Gas-1 • Gas-2 3 • Gas Phase Collision Processes-1 • Gas Phase Collision Processes-2 4 • Plasma • DC Glow Discharge • RF Discharge, Plasma Reactors and System Mid Examination 5 •Application 6 • Sputtering 7 • Film Deposition 8 • Etching Oral Presentation
Evaluation and grading policy	Mid Examination: 40% Presentation: 40% Others 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No Text Books: (1) Glow Discharge Processes, Brian Chapman John Wiley & Sons, 1980. (2) Cold Plasma in Materials Fabrication (From Fundamentals to Applications, Alfred Grill, IEEE Press, 1993 (3) Film Deposition by Plasma Techniques, Mitsuhara Konuma, Springer-Verlag, 1992
The access to curricular consultation	Line Group Discussion
The course corresponds to the SDGs	SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG17：夥伴關係（Partnerships for the Goals）
Note