Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2024 331835 Advanced IC Process 1 3.0 3 ★ Yuan-Jen Chang GME
GMT
IMMA
DME
機電外國學生專班 48 1 機電所、製科所、機械自動化專班和機電博(含外)合開,

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2024	331835	Advanced IC Process	1	3.0	3	★	Yuan-Jen Chang	GME GMT IMMA DME 機電外國學生專班	48	1	機電所、製科所、機械自動化專班和機電博(含外)合開,

Course Plan：

Instructor Yuan-Jen Chang　Office Hours

Email yjchang@ntut.edu.tw

Last Updated 2024-05-15 13:22:39

Course Objective 先修課程：半導體元件物理﹙4005032﹚。本課程著重於IC製程技術之學習。課程內容包括：IC絕緣技術、模組製程技術、導線技術、整合工程技術、SOC技術及半導體奈米元件技術等。 A study on advanced IC process. The contents cover IC isolation technology, module process, interconnection line process, process integration, SOC applications and CMOS nano device engineering etc.

Course Schedule Week Content Week 1 導論 (Introduction) Week 2 積體電路生產簡介 (Introduction of IC process) Week 3 半導體材料 (Semiconductor Materials) Week 4 半導體材料 (Semiconductor Materials) Week 5 晶圓製造 (Wafer Fabrication Process) Week 6 熱製程 (Thermal Processing) Week 7 微影製程 (Lithography) Week 8 微影製程 (Lithography) Week 9 蝕刻 (Etching) / Mid-term Exam Week 10 蝕刻 (Etching) Week 11 離子佈植 (Ion Implantation) Week 12 離子佈植 (Ion Implantation) Week 13 物理氣相沉積 (PVD) Week 14 物理氣相沉積 (PVD) Week 15 化學氣相沉積 (CVD) Week 16 化學氣相沉積 (CVD) Week 17 化學機械研磨 (CMP) Week 18 Final Exam

Evaluation and grading policy Mid-term 50% Final Exam 50%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
Introduction to semiconductor manufacturing technology, Xiao Hong, SPIE, c2012 半導體製程技術導論(第三版), 蕭宏著, 全華書局，103年8月

The access to curricular consultation Prof. Yuan-Jen Chang
Office: Complex Building, room 221
Phone: 02-27712171 ext. 2021
Email: yjchang@mail.ntut.edu.tw

The course corresponds to the SDGs

Note
Final Exam will be held on June 3 due to the schedule changed by university.
In week 17, it is a holiday.
In week 18, we will check out the final exam.

Instructor	Yuan-Jen Chang　Office Hours
Email	yjchang@ntut.edu.tw
Last Updated	2024-05-15 13:22:39
Course Objective	先修課程：半導體元件物理﹙4005032﹚。本課程著重於IC製程技術之學習。課程內容包括：IC絕緣技術、模組製程技術、導線技術、整合工程技術、SOC技術及半導體奈米元件技術等。 A study on advanced IC process. The contents cover IC isolation technology, module process, interconnection line process, process integration, SOC applications and CMOS nano device engineering etc.
Course Schedule	Week Content Week 1 導論 (Introduction) Week 2 積體電路生產簡介 (Introduction of IC process) Week 3 半導體材料 (Semiconductor Materials) Week 4 半導體材料 (Semiconductor Materials) Week 5 晶圓製造 (Wafer Fabrication Process) Week 6 熱製程 (Thermal Processing) Week 7 微影製程 (Lithography) Week 8 微影製程 (Lithography) Week 9 蝕刻 (Etching) / Mid-term Exam Week 10 蝕刻 (Etching) Week 11 離子佈植 (Ion Implantation) Week 12 離子佈植 (Ion Implantation) Week 13 物理氣相沉積 (PVD) Week 14 物理氣相沉積 (PVD) Week 15 化學氣相沉積 (CVD) Week 16 化學氣相沉積 (CVD) Week 17 化學機械研磨 (CMP) Week 18 Final Exam
Evaluation and grading policy	Mid-term 50% Final Exam 50%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No Introduction to semiconductor manufacturing technology, Xiao Hong, SPIE, c2012 半導體製程技術導論(第三版), 蕭宏著, 全華書局，103年8月
The access to curricular consultation	Prof. Yuan-Jen Chang Office: Complex Building, room 221 Phone: 02-27712171 ext. 2021 Email: yjchang@mail.ntut.edu.tw
The course corresponds to the SDGs
Note	Final Exam will be held on June 3 due to the schedule changed by university. In week 17, it is a holiday. In week 18, we will check out the final exam.