Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2023 316970 Semiconductor Process Integration 1 2.0 2 ★ CHUNG-KUANG YANG GCEB 16 1 網路預選限30人

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2023	316970	Semiconductor Process Integration	1	2.0	2	★	CHUNG-KUANG YANG	GCEB	16	1	網路預選限30人

Course Plan：

Instructor CHUNG-KUANG YANG　Office Hours

Email ckyang@ntut.edu.tw

Last Updated 2022-12-20 18:44:14

Course Objective In this class, the specified semiconductor process is considered as specified unit. By use of the concepts which belong to the chemical engineering unit operations to interpret the analysis / introduction in semiconductor industry and future developing trending. (Also including the theories of VLSI devices) The students who have studied professional chemical engineering courses for many years, can acquire completed and integrated viewpoints in semiconductor process. (Including processes; apparatuses and theories of devices) 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6. Metallization technology 7. Planarization technology 8. PVD and CVD Technology 9. Liner/Barrier/Seed (0.5-0.18um) 10. Metal Fill/ Metal Interconnect (0.5-0.18um) 11. Cu Integration (0.13um and beyond) 12. Gate/Bit Line/Capacitor 13. IC Equipments

Course Schedule 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6-7. Metallization technology 8. Mid-term examination 9. Planarization technology 10-12. PVD and CVD Technology 13. Liner/Barrier/Seed (0.5-0.18um) 14. Metal Fill/ Metal Interconnect (0.5-0.18um) 15. Cu Integration (0.13um and beyond) 16. Gate/Bit Line/Capacitor 17. IC Equipments 18 Final Exam

Evaluation and grading policy Mid-term examination 50% Final examination 50%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
Introduction to Semiconductor Manufacturing Technology, Second Edition, Author(s): Hong Xiao

The access to curricular consultation https://myweb.ntut.edu.tw/~ckyang/

The course corresponds to the SDGs

Note
We will give the lectures on line in case of outbreak of COVID. Please use the Microsoft TEAM preset for the course.

Instructor	CHUNG-KUANG YANG　Office Hours
Email	ckyang@ntut.edu.tw
Last Updated	2022-12-20 18:44:14
Course Objective	In this class, the specified semiconductor process is considered as specified unit. By use of the concepts which belong to the chemical engineering unit operations to interpret the analysis / introduction in semiconductor industry and future developing trending. (Also including the theories of VLSI devices) The students who have studied professional chemical engineering courses for many years, can acquire completed and integrated viewpoints in semiconductor process. (Including processes; apparatuses and theories of devices) 1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6. Metallization technology 7. Planarization technology 8. PVD and CVD Technology 9. Liner/Barrier/Seed (0.5-0.18um) 10. Metal Fill/ Metal Interconnect (0.5-0.18um) 11. Cu Integration (0.13um and beyond) 12. Gate/Bit Line/Capacitor 13. IC Equipments
Course Schedule	1. Industry overview 2. IC Fundamentals 3. IC Design 4. IC Fabrication 5. Interconnect RC Delay vs Scaling 6-7. Metallization technology 8. Mid-term examination 9. Planarization technology 10-12. PVD and CVD Technology 13. Liner/Barrier/Seed (0.5-0.18um) 14. Metal Fill/ Metal Interconnect (0.5-0.18um) 15. Cu Integration (0.13um and beyond) 16. Gate/Bit Line/Capacitor 17. IC Equipments 18 Final Exam
Evaluation and grading policy	Mid-term examination 50% Final examination 50%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Introduction to Semiconductor Manufacturing Technology, Second Edition, Author(s): Hong Xiao
The access to curricular consultation	https://myweb.ntut.edu.tw/~ckyang/
The course corresponds to the SDGs
Note	We will give the lectures on line in case of outbreak of COVID. Please use the Microsoft TEAM preset for the course.