Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2023 314416 Introduction to semiconductor manufacturing technology 1 3.0 3 ★ Mei-Hsin Chen GEOE
IEECSG 16 0 　

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2023	314416	Introduction to semiconductor manufacturing technology	1	3.0	3	★	Mei-Hsin Chen	GEOE IEECSG	16	0

Course Plan：

Instructor Mei-Hsin Chen　Office Hours

Email mhchen@mail.ntut.edu.tw

Last Updated 2022-12-21 09:58:40

Course Objective 導論、積體電路生產介紹、半導體基礎、晶圓製造、加熱製程、微影蝕刻、電漿的基礎原理、離子佈植、化學氣相沉積與介電質薄膜、金屬化製程、化學機械研磨、製程整合、CMOS 製程 Introduction、Introduction to IC Fabrication、Semiconductor Basics、 Wafer Manufacturing、Thermal Processes、Photolithography and Etch、 Plasma Basics、Ion Implantation、CVD and Dielectric Thin Film、 Metallization、CMP 、Process Integration、CMOS Processes

Course Schedule Introduction to IC Fabrication ( 1 week ) Semiconductor Basics ( 2 weeks ) Wafer Manufacturing ( 1 week ) Thermal Processes ( 2 weeks ) Photolithography and Etch ( 1 week ) Plasma Basics ( 2 weeks ) Ion Implantation ( 1 week ) CVD and Dielectric Thin Film ( 2 weeks ) Metallization ( 1 week ) CMP ( 1 week ) Process Integration ( 1 week ) CMOS Processes ( 1 week )

Evaluation and grading policy Attendance : 10 % Midterm: 30 % ( close book ) Final term：30 % (close book ) Presentation：30 % (15 minutes presentation per person)

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
Introduction to semiconductor manufacturing technology

The access to curricular consultation TA time

The course corresponds to the SDGs

Note
According to the CDC announcement, if the situation reaches the Level 2 COVID-19 alert, the students can attend class via logging into Microsoft Teams ( please use your student account). And then, choose the course "Introduction to semiconductor manufacturing technology", you can attend the meeting online.

Instructor	Mei-Hsin Chen　Office Hours
Email	mhchen@mail.ntut.edu.tw
Last Updated	2022-12-21 09:58:40
Course Objective	導論、積體電路生產介紹、半導體基礎、晶圓製造、加熱製程、微影蝕刻、電漿的基礎原理、離子佈植、化學氣相沉積與介電質薄膜、金屬化製程、化學機械研磨、製程整合、CMOS 製程 Introduction、Introduction to IC Fabrication、Semiconductor Basics、 Wafer Manufacturing、Thermal Processes、Photolithography and Etch、 Plasma Basics、Ion Implantation、CVD and Dielectric Thin Film、 Metallization、CMP 、Process Integration、CMOS Processes
Course Schedule	Introduction to IC Fabrication ( 1 week ) Semiconductor Basics ( 2 weeks ) Wafer Manufacturing ( 1 week ) Thermal Processes ( 2 weeks ) Photolithography and Etch ( 1 week ) Plasma Basics ( 2 weeks ) Ion Implantation ( 1 week ) CVD and Dielectric Thin Film ( 2 weeks ) Metallization ( 1 week ) CMP ( 1 week ) Process Integration ( 1 week ) CMOS Processes ( 1 week )
Evaluation and grading policy	Attendance : 10 % Midterm: 30 % ( close book ) Final term：30 % (close book ) Presentation：30 % (15 minutes presentation per person)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Introduction to semiconductor manufacturing technology
The access to curricular consultation	TA time
The course corresponds to the SDGs
Note	According to the CDC announcement, if the situation reaches the Level 2 COVID-19 alert, the students can attend class via logging into Microsoft Teams ( please use your student account). And then, choose the course "Introduction to semiconductor manufacturing technology", you can attend the meeting online.