Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2021 287950 Semiconductor Processings 1 3.0 3 ★ Hsin-Hui Hu 4EN4C 12 1 綜科502，日職合開

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2021	287950	Semiconductor Processings	1	3.0	3	★	Hsin-Hui Hu	4EN4C	12	1	綜科502，日職合開

Course Plan：

Instructor Hsin-Hui Hu

Email hhhu@ntut.edu.tw

Last Updated 2020-12-17 10:42:24

Course Objective 1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography

Course Schedule 1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Semiconductor Fundamental 4.Wafer Manufacturing 5.Cleanroom, Clearn and Gettering 6.Thermal Oxidation 7.Diffusion 8.Ion Implantation 9.Mid-term Exam 10.Etching 11.Deposition 12.Lithography 13.Lithography 14.上機實習 15.上機實習 16.上機實習 17.Final Exam 18.Final Project

Evaluation and grading policy Attendance (10%) Mid-term Exam (20%) Final Exam (30%) Final Project (40%)

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
[1] Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, 2000, Prentice Hall [2] James D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling”, 2000, Prentice Hall. [3] Stanley Wolf and Richard N. Tauber “Silicon Processing for the VLSI ERA, Volume1: Process Technology”, 1986, Lattice Press. [4] W. R. Runyan and K. E. Bean “Semiconductor Integrated Circuit Processing Technology”, 1990, Addison-Wesley. [5] James W. Mayer and Sylvanus S. Lau “Electronic Materials Science: For Integrated Circuits in SI and GaAs”, 1989, Prentice Hall.

The access to curricular consultation

Note
　

Instructor	Hsin-Hui Hu
Email	hhhu@ntut.edu.tw
Last Updated	2020-12-17 10:42:24
Course Objective	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography
Course Schedule	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Semiconductor Fundamental 4.Wafer Manufacturing 5.Cleanroom, Clearn and Gettering 6.Thermal Oxidation 7.Diffusion 8.Ion Implantation 9.Mid-term Exam 10.Etching 11.Deposition 12.Lithography 13.Lithography 14.上機實習 15.上機實習 16.上機實習 17.Final Exam 18.Final Project
Evaluation and grading policy	Attendance (10%) Mid-term Exam (20%) Final Exam (30%) Final Project (40%)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes [1] Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, 2000, Prentice Hall [2] James D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling”, 2000, Prentice Hall. [3] Stanley Wolf and Richard N. Tauber “Silicon Processing for the VLSI ERA, Volume1: Process Technology”, 1986, Lattice Press. [4] W. R. Runyan and K. E. Bean “Semiconductor Integrated Circuit Processing Technology”, 1990, Addison-Wesley. [5] James W. Mayer and Sylvanus S. Lau “Electronic Materials Science: For Integrated Circuits in SI and GaAs”, 1989, Prentice Hall.
The access to curricular consultation
Note