Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Fall Semester
Year 2018 248308 Semiconductor Processings 1 3.0 3 ★ Hsiao-Hsuan HSU GMMR 47 1 　

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2018	248308	Semiconductor Processings	1	3.0	3	★	Hsiao-Hsuan HSU	GMMR	47	1

Course Plan：

Instructor Hsiao-Hsuan HSU

Email hhhsu@mail.ntut.edu.tw

Last Updated 2018-06-05 10:43:29

Course Objective This course will be offered half English and half Chinese and will introduce the semiconductor process, including device basics, process flow, manufacturing, and process integration. The students will gain a thorough overview on semiconductor manufacturing technology before working in industry. 本課程探討半導體製程的原理與相關技術，內容含括：晶圓製備、爐管、黃光微影、擴散、蝕刻、離子佈植、與後段製程。學生可了解半導體產業的發展趨勢，以作為進入半導體、光電、感測器等產業的先備知識。 (中英授課)

Course Schedule 1. Introduction of IC Fabrication 2. Semiconductor Basics 3. Wafer Manufacturing and Epitaxy 4. Oxidation and Thermal Processes 5. Photolithography 6. Ion Implantation 7. Dry Etching and Wet Etching 8. CVD and PVD 9. Metallization 10. Process Integration

Evaluation and grading policy Mid-term Exam 40% Final Exam 40% Homework and Attendance 20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
Michael Quirk, Julian Serda, "Semiconductor Manufacturing Technology", Pearson, 2013 ISBN: 978-986-154-117-4

The access to curricular consultation

Note
　

Instructor	Hsiao-Hsuan HSU
Email	hhhsu@mail.ntut.edu.tw
Last Updated	2018-06-05 10:43:29
Course Objective	This course will be offered half English and half Chinese and will introduce the semiconductor process, including device basics, process flow, manufacturing, and process integration. The students will gain a thorough overview on semiconductor manufacturing technology before working in industry. 本課程探討半導體製程的原理與相關技術，內容含括：晶圓製備、爐管、黃光微影、擴散、蝕刻、離子佈植、與後段製程。學生可了解半導體產業的發展趨勢，以作為進入半導體、光電、感測器等產業的先備知識。 (中英授課)
Course Schedule	1. Introduction of IC Fabrication 2. Semiconductor Basics 3. Wafer Manufacturing and Epitaxy 4. Oxidation and Thermal Processes 5. Photolithography 6. Ion Implantation 7. Dry Etching and Wet Etching 8. CVD and PVD 9. Metallization 10. Process Integration
Evaluation and grading policy	Mid-term Exam 40% Final Exam 40% Homework and Attendance 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Michael Quirk, Julian Serda, "Semiconductor Manufacturing Technology", Pearson, 2013 ISBN: 978-986-154-117-4
The access to curricular consultation
Note