Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2026 359884 Equipment – Advanced Technologies of Semiconductor 1 3.0 3 ★ Bao-Chyi Wang GME
GMT
半導體學位學程 55 2 機電所.製科所和半導體碩班合開，綜三演講廳

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	359884	Equipment – Advanced Technologies of Semiconductor	1	3.0	3	★	Bao-Chyi Wang	GME GMT 半導體學位學程	55	2	機電所.製科所和半導體碩班合開，綜三演講廳

Course Plan：

Instructor Bao-Chyi Wang

Email Steve_Wang@amat.com

Last Updated 2026-01-28 10:21:50

Course Objective 1.半導體: 5種模組介紹 - 真空、機器手臂、射頻/電漿、真空吸盤/加熱體、氣體儀表盤 - 從理論到應用。 8種半導體機台介紹 Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.期末海報展 1.Semiconductor: 5 Modules – Vacuum, Robot, Plasma/RF, Electric Static Chuck (ESC)/Heater and Gas Panel. 8 Equipment - Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.Factory Touring: Global Technical Learning Center (GTLC) Lab Touring at Hsinchu. 3.Top Executive Sharing: Worthy Horng – Cust Services & Supt, VP of AMAT. 4.Final Exam – Poster Exhibition.

Course Schedule Week 2 Introduction to Course and Applied Materials Week 3 (1) Plasma/RF System and (2) Robot System - from Theory to Application Week 4 Electro-Static-Chuck (ESC)/Heater - from Theory to Application Week 5 Epi and RTP Equipment Week 7 (1) Vacuum System and (2) Gas Panel System - from Theory to Application Week 8 Implant Equipment Week 9 Metal Deposition Product (MDP) Equipment Week 11 (1) The Magic Within and (2) 機不可失 Week 12 Mid-Term Exam Week 13 Etch Equipment Week 14 Global Technical Learning Center (GTLC) Lab Touring Week 15 Process Diagnostic & Control (PDC) Equipment Week 16 Electro-Chemical Deposition (ECD) Equipment Week 18 Final Exam - Poster Exhibition

Evaluation and grading policy 40% Mid-Term Exam + 60% Final Exam - Poster Exhibition

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
1. VLSI製造技術 by 莊達人. 2. Introduction to Semiconductor Manufacturing Technology, by Hong Xiao. 3. Semiconductor Manufacturing Technology, by Michael Quirk and Julian Serda.

The access to curricular consultation Steve_Wang@amat.com

Expanding teaching and resources

The course corresponds to the SDGs SDG4：優質教育（Quality Education）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）

Note
　

Instructor	Bao-Chyi Wang
Email	Steve_Wang@amat.com
Last Updated	2026-01-28 10:21:50
Course Objective	1.半導體: 5種模組介紹 - 真空、機器手臂、射頻/電漿、真空吸盤/加熱體、氣體儀表盤 - 從理論到應用。 8種半導體機台介紹 Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.期末海報展 1.Semiconductor: 5 Modules – Vacuum, Robot, Plasma/RF, Electric Static Chuck (ESC)/Heater and Gas Panel. 8 Equipment - Epi/RTP, Implant, MDP, DDP, Etch, CMP, PDC and ECD. 2.Factory Touring: Global Technical Learning Center (GTLC) Lab Touring at Hsinchu. 3.Top Executive Sharing: Worthy Horng – Cust Services & Supt, VP of AMAT. 4.Final Exam – Poster Exhibition.
Course Schedule	Week 2 Introduction to Course and Applied Materials Week 3 (1) Plasma/RF System and (2) Robot System - from Theory to Application Week 4 Electro-Static-Chuck (ESC)/Heater - from Theory to Application Week 5 Epi and RTP Equipment Week 7 (1) Vacuum System and (2) Gas Panel System - from Theory to Application Week 8 Implant Equipment Week 9 Metal Deposition Product (MDP) Equipment Week 11 (1) The Magic Within and (2) 機不可失 Week 12 Mid-Term Exam Week 13 Etch Equipment Week 14 Global Technical Learning Center (GTLC) Lab Touring Week 15 Process Diagnostic & Control (PDC) Equipment Week 16 Electro-Chemical Deposition (ECD) Equipment Week 18 Final Exam - Poster Exhibition
Evaluation and grading policy	40% Mid-Term Exam + 60% Final Exam - Poster Exhibition
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes 1. VLSI製造技術 by 莊達人. 2. Introduction to Semiconductor Manufacturing Technology, by Hong Xiao. 3. Semiconductor Manufacturing Technology, by Michael Quirk and Julian Serda.
The access to curricular consultation	Steve_Wang@amat.com
Expanding teaching and resources
The course corresponds to the SDGs	SDG4：優質教育（Quality Education） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI	● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
Note