Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2025 345739 The lithography process, materials, and defect control technology 1 2.0 2 ★ Ching-Yu Chang 半導體學位學程 11 2 半導體碩班

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	345739	The lithography process, materials, and defect control technology	1	2.0	2	★	Ching-Yu Chang	半導體學位學程	11	2	半導體碩班

Course Plan：

Instructor Ching-Yu Chang

Email mailtocy@yahoo.com.tw

Last Updated 2024-12-18 00:26:45

Course Objective 半導體黃光微影技術是先進半導體製程的關鍵之一。如何優化曝光的光學系統和成像光阻的化學系統，以及控制顯影成像後的不良粒子缺陷，是決定先進半導體成敗與良率的關鍵。本課程涵蓋黃光微影技術的基本原理、步驟和光阻材料的組成，讓學員獲得整體性概念，了解黃光微影技術在晶圓製造中的角色及其對良率的影響。通過實際案例的介紹與演練，學員能更清楚地掌握專業背景知識並學以致用，培養半導體產業所需的技能，提升未來就業基礎與創新能力。課程將分為三個階段進行。第一階段介紹微影製程的基本原理及光阻材料，幫助學員累積研發與解決問題的專業知識。第二階段通過應用和實戰案例解析，使學員了解產業運作中的實際知識與技巧，並培養從微觀角度理解與思考問題的能力，提升自學效率與興趣。第三階段以模擬演練的方式，協助學員建立問題解決的技巧，增強他們的能力與信心。 Semiconductor lithography technology is the most crucial step in advanced semiconductor processes. Optimizing the optical system in exposure parameters and the chemical system in resist formulation design, as well as controlling defects in resist and the development step, are crucial for the success of advanced semiconductor production. This course covers the fundamental principles, steps, and composition of lithography technology, providing participants with a comprehensive understanding of the role of lithography in wafer manufacturing. Through practical case studies and exercises, participants can gain a clearer grasp of professional background knowledge and apply it effectively, cultivating the skills required in the semiconductor industry and enhancing future employment foundations and innovation capabilities.

Course Schedule 周次單元主題 1 黃光微影製程簡介 2 光學光罩及曝光設備簡介 3 微影塗佈及顯影設備簡介 4-6 半導體光阻材料 7. 半導體微影不良粒子控制技術 8-16 研究報告及實務應用解析

Evaluation and grading policy 1. 研究報告 50% 2. 學習測驗 30% 3. 上課表現 20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
1. 教師準備之講義 2. 專業期刊

The access to curricular consultation 教師信箱:mailtocy@yahoo.com.tw

Expanding teaching and resources

The course corresponds to the SDGs SDG4：優質教育（Quality Education）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG12：負責任的消費與生產（Responsible Consumption and Production）
SDG17：夥伴關係（Partnerships for the Goals）

Does the course incorporate AI

Note
　

Instructor	Ching-Yu Chang
Email	mailtocy@yahoo.com.tw
Last Updated	2024-12-18 00:26:45
Course Objective	半導體黃光微影技術是先進半導體製程的關鍵之一。如何優化曝光的光學系統和成像光阻的化學系統，以及控制顯影成像後的不良粒子缺陷，是決定先進半導體成敗與良率的關鍵。本課程涵蓋黃光微影技術的基本原理、步驟和光阻材料的組成，讓學員獲得整體性概念，了解黃光微影技術在晶圓製造中的角色及其對良率的影響。通過實際案例的介紹與演練，學員能更清楚地掌握專業背景知識並學以致用，培養半導體產業所需的技能，提升未來就業基礎與創新能力。課程將分為三個階段進行。第一階段介紹微影製程的基本原理及光阻材料，幫助學員累積研發與解決問題的專業知識。第二階段通過應用和實戰案例解析，使學員了解產業運作中的實際知識與技巧，並培養從微觀角度理解與思考問題的能力，提升自學效率與興趣。第三階段以模擬演練的方式，協助學員建立問題解決的技巧，增強他們的能力與信心。 Semiconductor lithography technology is the most crucial step in advanced semiconductor processes. Optimizing the optical system in exposure parameters and the chemical system in resist formulation design, as well as controlling defects in resist and the development step, are crucial for the success of advanced semiconductor production. This course covers the fundamental principles, steps, and composition of lithography technology, providing participants with a comprehensive understanding of the role of lithography in wafer manufacturing. Through practical case studies and exercises, participants can gain a clearer grasp of professional background knowledge and apply it effectively, cultivating the skills required in the semiconductor industry and enhancing future employment foundations and innovation capabilities.
Course Schedule	周次單元主題 1 黃光微影製程簡介 2 光學光罩及曝光設備簡介 3 微影塗佈及顯影設備簡介 4-6 半導體光阻材料 7. 半導體微影不良粒子控制技術 8-16 研究報告及實務應用解析
Evaluation and grading policy	1. 研究報告 50% 2. 學習測驗 30% 3. 上課表現 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No 1. 教師準備之講義 2. 專業期刊
The access to curricular consultation	教師信箱:mailtocy@yahoo.com.tw
Expanding teaching and resources
The course corresponds to the SDGs	SDG4：優質教育（Quality Education） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG12：負責任的消費與生產（Responsible Consumption and Production） SDG17：夥伴關係（Partnerships for the Goals）
Does the course incorporate AI
Note