Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2026	364676	Clean room design	1	3.0	3	★	Lin,Ti	半導體學位學程	2	0	創新半導體

Course Plan：

Instructor	Lin,Ti
Email	whitelin1112@gmail.com
Last Updated	2026-06-04 14:40:41
Course Objective	本課程包含下列課題 1.空氣清淨機構理論。 2.無塵室構造、建造及確效。 3.空氣過濾理論。 4.無塵室設計專案。 5. 論文研讀。 This course covers the following Topics. 1.Theory of air cleaning Mechanism. 2.Clean room configuration, construction and verification. 3.Air filtration theory. 4.Paper discussion.
Course Schedule	Cleanroom history and application (2 hrs) Design criteria of industrial and bio cleanrooms (2 hrs) Ventilation theory for cleanroom(4 hrs) HVAC theory for cleanroom(6 hrs) Mid-term exam(3 hrs). Facility system – nine sub-system(6 hrs) Utility system – gas, water, power etc. (3 hrs) Airborne molecular contamination – influence, testing, and solution(3 hrs) Cleanroom testing, adjustment and balancing(3 hrs) Cleanroom verification (3 hrs) Final design project (9 hrs)
Evaluation and grading policy	Mid term exam 30% Final eaxm 30% participation 20%. homework 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No Textbook(s) and References: 1. Handout provided by the instructor. 2. Cleanroom Technology, Fundamental of design, testing and operation By W Whyte, John Wiley and Sons., Ltd. 3. Aerosol Science and Technology, 2nd edition, By W. Hinds, John Willey 4 Refereed Journal Papers
The access to curricular consultation	綜科B12
Expanding teaching and resources	● 無 (None)
The course corresponds to the SDGs	無（None）
Does the course incorporate AI	● 無（None）
Note