Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2026 360369 High-Tech Facility Management 1 3.0 3 ★ Chi-Yun Liu GCDPE 13 0 土木208

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	360369	High-Tech Facility Management	1	3.0	3	★	Chi-Yun Liu	GCDPE	13	0	土木208

Course Plan：

Instructor Chi-Yun Liu　Office Hours

Email cyliu@mail.ntut.edu.tw

Last Updated 2026-01-08 21:10:58

Course Objective This course introduces the principles and practices of facility engineering and management for high-tech industries, including semiconductor, FPD (Flat Panel Display), biotechnology, and precision manufacturing. It covers critical infrastructure such as cleanrooms, HVAC systems, UPW, chemical and gas supply, power distribution, energy efficiency, carbon neutrality, and operational resilience.

Course Schedule Week 1 – Introduction Week 2 – Overview of Integrated Circuit Manufacturing Week 3 – Fundamentals of Semiconductors Week 4 – Wafer Fabrication Week 5 – Cleanrooms and HVAC Systems Week 6 – Ultrapure Water Treatment Week 7 – CCSS (Centralized Chemical Supply Systems) Week 8 – Centralized Gas Supply Systems Week 9 – Midterm Group Project Week 10 – Wastewater Treatment and Recycling Week 11 – Power Systems and FMCS (Facility Monitoring and Control) Week 12 – Facility Infrastructure Architecture Week 13 – ESH (Environment, Safety, and Health) Management Week 14 – Hook-up Design and Spatial Coordination Week 15 – Fab Design Evaluation and Construction Supervision Management Week 16 – Risk Assessment and Management Planning Week 17 – High-Tech Fab Construction and Operating Cost Analysis Week 18 – Final Group Project

Evaluation and grading policy Midterm group project：35% Final group project：45% Participation & In-Class Activities：20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
Case studies

The access to curricular consultation Please confirm the discussion time by email.

Expanding teaching and resources

The course corresponds to the SDGs SDG6：潔淨水與衛生（Clean Water and Sanitation）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG12：負責任的消費與生產（Responsible Consumption and Production）
SDG13：氣候行動（Climate Action）

Does the course incorporate AI ● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process）
● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）

Note
　

Instructor	Chi-Yun Liu　Office Hours
Email	cyliu@mail.ntut.edu.tw
Last Updated	2026-01-08 21:10:58
Course Objective	This course introduces the principles and practices of facility engineering and management for high-tech industries, including semiconductor, FPD (Flat Panel Display), biotechnology, and precision manufacturing. It covers critical infrastructure such as cleanrooms, HVAC systems, UPW, chemical and gas supply, power distribution, energy efficiency, carbon neutrality, and operational resilience.
Course Schedule	Week 1 – Introduction Week 2 – Overview of Integrated Circuit Manufacturing Week 3 – Fundamentals of Semiconductors Week 4 – Wafer Fabrication Week 5 – Cleanrooms and HVAC Systems Week 6 – Ultrapure Water Treatment Week 7 – CCSS (Centralized Chemical Supply Systems) Week 8 – Centralized Gas Supply Systems Week 9 – Midterm Group Project Week 10 – Wastewater Treatment and Recycling Week 11 – Power Systems and FMCS (Facility Monitoring and Control) Week 12 – Facility Infrastructure Architecture Week 13 – ESH (Environment, Safety, and Health) Management Week 14 – Hook-up Design and Spatial Coordination Week 15 – Fab Design Evaluation and Construction Supervision Management Week 16 – Risk Assessment and Management Planning Week 17 – High-Tech Fab Construction and Operating Cost Analysis Week 18 – Final Group Project
Evaluation and grading policy	Midterm group project：35% Final group project：45% Participation & In-Class Activities：20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No Case studies
The access to curricular consultation	Please confirm the discussion time by email.
Expanding teaching and resources
The course corresponds to the SDGs	SDG6：潔淨水與衛生（Clean Water and Sanitation） SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG12：負責任的消費與生產（Responsible Consumption and Production） SDG13：氣候行動（Climate Action）
Does the course incorporate AI	● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process） ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools） ● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）
Note