Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Fall Semester
Year 2026 364672 Semiconductor Fabrication Technologies 1 3.0 3 ★ Hsu Ying Chao 半導體學位學程 2 0 創新半導體/英文授課

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2026	364672	Semiconductor Fabrication Technologies	1	3.0	3	★	Hsu Ying Chao	半導體學位學程	2	0	創新半導體/英文授課

Course Plan：

Instructor Hsu Ying Chao

Email yingchaohsu@ntut.edu.tw

Last Updated 2026-06-15 08:46:34

Course Objective 本課程主要是介紹括半導體產業概述, 半導體元件基礎, 半導體元件與後段製造技術與設備, 元件電性分析與量測與半導體封裝。 This course mainly introduce on semiconductor materials and fabrication technology: 1. Overview of semiconductor industry and circuit componenet introduction 2. Semiconductor fundamental (materials, device physics and application) 3. Front End of Line (FEOL) Technology 4. Backend of Line (BEOL) Technology 5. Crystal growth , basic properties of Silicon Wafer 6. Introduce 7 principle fabrication modules: Photo lithography, film deposiotn, etch, clean, CMP, Diffution and process integration 7. Introduce device electricl test 8. Semiconductor packaging

Course Schedule 1. WK1-2: Overview of semiconductor industry and circuit componenet introduction 2. WK3-5: Semiconductor fundamental 3.WK6-7: Front End of Line (FEOL) Technology 4. WK8: Course review & Midterm examination 5. WK9-10: Backend of Line (BEOL) Technology 6. WK11-12: Crystal growth , basic properties of Silicon Wafer 7. WK 13-15: Introduce 7 principle fabrication modules 8. WK16: Introduce device electricl test 9. WK17: Semiconductor packaging 10: WK18: Course review & Midterm examination

Evaluation and grading policy 出席率 : 10% (請假請預先告知) 測驗-1 (Week 5): 15% 期中考 (Week 9): 15% 測驗-2 (Week 14): 15% 期末考 (Week 18): 35% 討論Q&A: 10% (1Q +1分, 上限10分) 通知補考(補考者學期末最高成績:70分)

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
使用自編教材 / Use of self-made materials

The access to curricular consultation 1. 陳金聖教授, 自動化科技研究所暨創新前瞻科技研究學院院長 (Pro. Chin-Sheng Chen, Dean of iFirst)
2. 曾釋教授 ,半導體科技碩士學位學程主任)( Pro. Shih-Feng Tseng, Direct, Master Program in Semiconductor Technology )

Expanding teaching and resources ● 無 (None)

The course corresponds to the SDGs SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI ● 無（None）

Note
　

Instructor	Hsu Ying Chao
Email	yingchaohsu@ntut.edu.tw
Last Updated	2026-06-15 08:46:34
Course Objective	本課程主要是介紹括半導體產業概述, 半導體元件基礎, 半導體元件與後段製造技術與設備, 元件電性分析與量測與半導體封裝。 This course mainly introduce on semiconductor materials and fabrication technology: 1. Overview of semiconductor industry and circuit componenet introduction 2. Semiconductor fundamental (materials, device physics and application) 3. Front End of Line (FEOL) Technology 4. Backend of Line (BEOL) Technology 5. Crystal growth , basic properties of Silicon Wafer 6. Introduce 7 principle fabrication modules: Photo lithography, film deposiotn, etch, clean, CMP, Diffution and process integration 7. Introduce device electricl test 8. Semiconductor packaging
Course Schedule	1. WK1-2: Overview of semiconductor industry and circuit componenet introduction 2. WK3-5: Semiconductor fundamental 3.WK6-7: Front End of Line (FEOL) Technology 4. WK8: Course review & Midterm examination 5. WK9-10: Backend of Line (BEOL) Technology 6. WK11-12: Crystal growth , basic properties of Silicon Wafer 7. WK 13-15: Introduce 7 principle fabrication modules 8. WK16: Introduce device electricl test 9. WK17: Semiconductor packaging 10: WK18: Course review & Midterm examination
Evaluation and grading policy	出席率 : 10% (請假請預先告知) 測驗-1 (Week 5): 15% 期中考 (Week 9): 15% 測驗-2 (Week 14): 15% 期末考 (Week 18): 35% 討論Q&A: 10% (1Q +1分, 上限10分) 通知補考(補考者學期末最高成績:70分)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No 使用自編教材 / Use of self-made materials
The access to curricular consultation	1. 陳金聖教授, 自動化科技研究所暨創新前瞻科技研究學院院長 (Pro. Chin-Sheng Chen, Dean of iFirst) 2. 曾釋教授 ,半導體科技碩士學位學程主任)( Pro. Shih-Feng Tseng, Direct, Master Program in Semiconductor Technology )
Expanding teaching and resources	● 無 (None)
The course corresponds to the SDGs	SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI	● 無（None）
Note