Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2026 359841 Advanced IC Fabrication Process 1 3.0 3 ★ Yuan-Jen Chang GME
GMT
IMMA 37 0 機電、製科、外生專班合開，限40人；製科◎、甲選修

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	359841	Advanced IC Fabrication Process	1	3.0	3	★	Yuan-Jen Chang	GME GMT IMMA	37	0	機電、製科、外生專班合開，限40人；製科◎、甲選修

Course Plan：

Instructor Yuan-Jen Chang　Office Hours

Email yjchang@ntut.edu.tw

Last Updated 2025-12-19 09:56:27

Course Objective 本課程主要為半導體製程之基礎課程。教學目標為使學生了解半導體基礎知識，對於積體電路之前後段各站製程之原理與步驟有基礎認識。本課程預計以英語授課方式進行。 This course is a fundamental course to introduce the basics of integrated circuit manufacturing process. The goal of the course is to provide the basic knowledge of general semiconductor and the principle and step of each front /back end of the semiconductor manufacturing processes. The course will be provided in English.

Course Schedule 第一週導論 (Introduction) 第二週積體電路生產簡介 (Introduction of IC process) 第三週半導體材料 (Semiconductor Materials) 第四週半導體材料 (Semiconductor Materials) 第五週晶圓製造 (Wafer Fabrication Process) 第六週熱製程 (Thermal Processing) 第七週微影製程 (Lithography) 第八週微影製程 (Lithography) 第九週蝕刻 (Etching) / Mid-term Exam 第十週蝕刻 (Etching) 第十一週離子佈植 (Ion Implantation) 第十二週離子佈植 (Ion Implantation) 第十三週物理氣相沉積 (PVD) 第十四週物理氣相沉積 (PVD) 第十五週化學氣相沉積 (CVD) 第十六週化學氣相沉積 (CVD) 第十七週化學機械研磨 (CMP) 第十八週 Final Report

Evaluation and grading policy 期中考以及期末報告 Mid-term and Final report 占比於第一堂課公布 Percentage will be announced in syllabus and in the 1st class of the semester.

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
提供課程簡報 PPT will be provided.

The access to curricular consultation NTUT ipluse and Email

The course corresponds to the SDGs SDG1：消除貧窮（No Poverty）
SDG4：優質教育（Quality Education）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）

Note
　

Instructor	Yuan-Jen Chang　Office Hours
Email	yjchang@ntut.edu.tw
Last Updated	2025-12-19 09:56:27
Course Objective	本課程主要為半導體製程之基礎課程。教學目標為使學生了解半導體基礎知識，對於積體電路之前後段各站製程之原理與步驟有基礎認識。本課程預計以英語授課方式進行。 This course is a fundamental course to introduce the basics of integrated circuit manufacturing process. The goal of the course is to provide the basic knowledge of general semiconductor and the principle and step of each front /back end of the semiconductor manufacturing processes. The course will be provided in English.
Course Schedule	第一週導論 (Introduction) 第二週積體電路生產簡介 (Introduction of IC process) 第三週半導體材料 (Semiconductor Materials) 第四週半導體材料 (Semiconductor Materials) 第五週晶圓製造 (Wafer Fabrication Process) 第六週熱製程 (Thermal Processing) 第七週微影製程 (Lithography) 第八週微影製程 (Lithography) 第九週蝕刻 (Etching) / Mid-term Exam 第十週蝕刻 (Etching) 第十一週離子佈植 (Ion Implantation) 第十二週離子佈植 (Ion Implantation) 第十三週物理氣相沉積 (PVD) 第十四週物理氣相沉積 (PVD) 第十五週化學氣相沉積 (CVD) 第十六週化學氣相沉積 (CVD) 第十七週化學機械研磨 (CMP) 第十八週 Final Report
Evaluation and grading policy	期中考以及期末報告 Mid-term and Final report 占比於第一堂課公布 Percentage will be announced in syllabus and in the 1st class of the semester.
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No 提供課程簡報 PPT will be provided.
The access to curricular consultation	NTUT ipluse and Email
The course corresponds to the SDGs	SDG1：消除貧窮（No Poverty） SDG4：優質教育（Quality Education） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI	● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
Note