Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	356205	Semiconductor advanced equipment and key components	1	3.0	3	★	Tseng, Shih-Feng	GME 半導體學位學程	91	0	機電所和半導體碩班合開,限40人

Course Plan：

Instructor	Tseng, Shih-Feng　Office Hours
Email	tsf@ntut.edu.tw
Last Updated	2026-02-09 14:57:34
Course Objective	本課程沿續「積體電路製程先進技術與設備」課程，介紹半導體世代機台開發與製程應用、關鍵元件設計概念與應用，著重科學基礎知識如何應用在半導體產業。 As an extension of “Processing technology and equipment for advanced semiconductor manufacturing” course, this course focuses on how the scientific knowledge is connected and applied to the real development of tools and introduces the evolution of the design and application of semiconductor tools and key components.
Course Schedule	Week 上課時間 Course Vendor W1 02/25 先進光刻機演進與製程應用 ASML W2 03/04 爐管機台演進與製程應用 TEL W3 03/11 光阻塗佈&顯影機台演進與製程應用 TEL W4 03/18 PVD機台演進與製程應用 AMAT W5 03/25 運動會 W6 04/01 濕蝕刻機台演進與製程應用 Screen W7 04/08 磊晶機台演進與製程應用 ASM W8 04/15 Dry/turbo pump/Cryo pump Edward W9 04/22 期中考 W10 04/29 Chemical filter 科百特 W11 05/06 乾蝕刻機台演進與製程應用 Hitachi W12 05/13 CMP機台演進與製程應用 EBARA W13 05/20 Plasma generator system AE W14 05/27 Metrology 機台設計與量測應用 KLA W15 06/03 離子植入機台演進與製程應用 AMAT W16 06/10 Modeling and Simulation of Semiconductor Manufacturing Process Pitotech W17 06/17 Mass Flow Controller Horiba W18 06/24 期末考
Evaluation and grading policy	1.出席率：20% 2.期中考：40% 3.期末考：40%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No 自訂教材
The access to curricular consultation	聯絡方式：E-mail: tsf@ntut.edu.tw 討論地點：綜科館423室
Expanding teaching and resources
The course corresponds to the SDGs	SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI	● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）
Note	聯絡方式：E-mail: tsf@ntut.edu.tw; 分機：2043 上課及討論網址：https://meet.google.com/yqd-aiha-qit