Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2025 342187 Semiconductor advanced equipment and key components 1 3.0 3 ★ Tseng, Shih-Feng GME
半導體學位學程 118 1 限40人；{教室:教務處安排}

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	342187	Semiconductor advanced equipment and key components	1	3.0	3	★	Tseng, Shih-Feng	GME 半導體學位學程	118	1	限40人；{教室:教務處安排}

Course Plan：

Instructor Tseng, Shih-Feng　Office Hours

Email tsf@ntut.edu.tw

Last Updated 2025-02-03 21:14:27

Course Objective 本課程沿續「積體電路製程先進技術與設備」課程，介紹半導體世代機台開發與製程應用、關鍵元件設計概念與應用，著重科學基礎知識如何應用在半導體產業。 As an extension of “Processing technology and equipment for advanced semiconductor manufacturing” course, this course focuses on how the scientific knowledge is connected and applied to the real development of tools and introduces the evolution of the design and application of semiconductor tools and key components.

Course Schedule Week 上課時間 Course W1 02/19 先進光刻機演進與製程應用 W2 02/26 光阻塗佈&顯影機台演進與製程應用 W3 03/05 爐管機台演進與製程應用 W4 03/12 PVD機台演進與製程應用 W5 03/19 運動會 W6 03/26 濕蝕刻機台演進與製程應用 W7 04/02 磊晶機台演進與製程應用 W8 04/09 Dry/turbo pump/Cryo pump W9 04/16 Chemical filter W10 04/23 期中考 W11 04/30 乾蝕刻機台演進與製程應用 W12 05/07 CMP機台演進與製程應用 W13 05/14 Metrology 機台設計與量測應用 W14 05/21 Plasma generator system W15 05/28 離子植入機台演進與製程應用 W16 06/04 潔淨室AMC/VOC氣體連續監測系統 W17 06/11 Mass Flow Controller W18 06/18 期末考

Evaluation and grading policy 1.出席率：20% 2.期中考：40% 3.期末考：40%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
自訂教材

The access to curricular consultation 聯絡方式：E-mail: tsf@ntut.edu.tw
討論地點：綜科館423室

Expanding teaching and resources

The course corresponds to the SDGs SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI

Note
聯絡方式：E-mail: tsf@ntut.edu.tw; 分機：2043
上課及討論網址：https://meet.google.com/yqd-aiha-qit

Instructor	Tseng, Shih-Feng　Office Hours
Email	tsf@ntut.edu.tw
Last Updated	2025-02-03 21:14:27
Course Objective	本課程沿續「積體電路製程先進技術與設備」課程，介紹半導體世代機台開發與製程應用、關鍵元件設計概念與應用，著重科學基礎知識如何應用在半導體產業。 As an extension of “Processing technology and equipment for advanced semiconductor manufacturing” course, this course focuses on how the scientific knowledge is connected and applied to the real development of tools and introduces the evolution of the design and application of semiconductor tools and key components.
Course Schedule	Week 上課時間 Course W1 02/19 先進光刻機演進與製程應用 W2 02/26 光阻塗佈&顯影機台演進與製程應用 W3 03/05 爐管機台演進與製程應用 W4 03/12 PVD機台演進與製程應用 W5 03/19 運動會 W6 03/26 濕蝕刻機台演進與製程應用 W7 04/02 磊晶機台演進與製程應用 W8 04/09 Dry/turbo pump/Cryo pump W9 04/16 Chemical filter W10 04/23 期中考 W11 04/30 乾蝕刻機台演進與製程應用 W12 05/07 CMP機台演進與製程應用 W13 05/14 Metrology 機台設計與量測應用 W14 05/21 Plasma generator system W15 05/28 離子植入機台演進與製程應用 W16 06/04 潔淨室AMC/VOC氣體連續監測系統 W17 06/11 Mass Flow Controller W18 06/18 期末考
Evaluation and grading policy	1.出席率：20% 2.期中考：40% 3.期末考：40%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No 自訂教材
The access to curricular consultation	聯絡方式：E-mail: tsf@ntut.edu.tw 討論地點：綜科館423室
Expanding teaching and resources
The course corresponds to the SDGs	SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI
Note	聯絡方式：E-mail: tsf@ntut.edu.tw; 分機：2043 上課及討論網址：https://meet.google.com/yqd-aiha-qit