Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2020	278182	Special Topics in VLSI Processing Technology	1	3.0	3	★	Hsiao-Hsuan HSU	GMMR IDEOM	42	0	◎

Course Plan：

Instructor	Hsiao-Hsuan HSU
Email	hhhsu@mail.ntut.edu.tw
Last Updated	2020-05-25 16:04:07
Course Objective	This course will introduce the semiconductor process, including device basics, process flow, manufacturing, and process integration. The students will gain a thorough overview on semiconductor manufacturing technology before working in industry. Language: English
Course Schedule	1. Introduction of IC Fabrication 2. Semiconductor Basics 3. Wafer Manufacturing and Epitaxy 4. Oxidation and Thermal Processes 5. CVD and PVD 6. Metallization 7. Photolithography 8. Etching 9. Ion Implantation 10. Process Integration
Evaluation and grading policy	Mid-term Exam 40% Final Exam 40% Homework and Attendance 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Michael Quirk, Julian Serda, "Semiconductor Manufacturing Technology", Pearson, 2013 ISBN: 978-986-154-117-4
The access to curricular consultation
Expanding teaching and resources
The course corresponds to the SDGs
Does the course incorporate AI
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