Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Fall Semester
Year 2025 348852 Semiconductor molecular materials and fabrication testing 1 2.0 2 ★ Lee Yi-huan
Lin,Chun-Che 4MSE1
4ET1 105 4 分子一和工程一合開

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2025	348852	Semiconductor molecular materials and fabrication testing	1	2.0	2	★	Lee Yi-huan Lin,Chun-Che	4MSE1 4ET1	105	4	分子一和工程一合開

Course Plan：

Instructor Lin,Chun-Che　Office Hours

Email cclin0530@ntut.edu.tw

Last Updated 2025-06-03 17:58:52

Course Objective 本課程分為三大重點：(1) 製程涵蓋：半導體基礎原理、晶圓製造、加熱製程、蝕刻製程、化學氣相沉積、金屬化製程、製程整合技術。(2) 分析涵蓋：晶相結構分析、奈米3D顯微形貌表面形態分析、原子力顯微鏡。(3) 業界講師共同授課並分享產業為來發展趨勢。 The course is divided into three main points: (1) The fabrication: basic principles of semiconductor, wafer manufacturing, heating process, etching process, chemical vapor deposition, metallization process, and process integration technology. (2) Analysis: crystal structure analysis, nano 3D micro-topography and surface morphology analysis, atomic force microscope. (3) Industry lecturers teach and share industry trends in the future.

Course Schedule 第1週 (9/8-9/12, 2025) 導論第2週 (9/15-9/19, 2025) 半導體分子材料-1 第3週 (9/22-9/26, 2025) 半導體分子材料-2 第4週 (9/29-10/3, 2025) 化學氣相沉積-1 第5週 (10/6-10/10, 2025) 化學氣相沉積-2 第6週 (10/13-10/17, 2025) 半導體製程與應用-1 第7週 (10/20-10/24, 2025) 半導體製程與應用-2 第8週 (10/27-10/31, 2025) 蝕刻製程-1 第9週 (11/3-11/7, 2025) Midterm exam 第10週 (11/10-11/14, 2025) 業界實務講習第11週 (11/17-11/21, 2025) 蝕刻製程-2 第12週 (11/24-11/28, 2025) 業界實務講習第13週 (12/1-12/5, 2025) 分析技術與應用-1 第14週 (12/8-12/12, 2025) 分析技術與應用-2 第15週 (12/15-12/19, 2025) 業界實務講習第16週 (12/22-12/26, 2025) 製程整合技術-1 第17週 (12/29-1/2, 2025) 製程整合技術-2 第18週 (1/5-1/9, 2026) Final Exam

Evaluation and grading policy Midterm exam (40%) Final Exam (40%) Class attendance and homework (20%)

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
1. 半導體製造技術與管理 (簡富; 清華大學出版) 2. Handbook of Microscopy for Nanotechnology (N. Yao and Z. L. Wang; KLUWER ACADEMIC PUBLISHERS) 3. 業師自備課程

The access to curricular consultation (1) 教師諮商時間Office Hours
(Monday: 13:00 ~ 15:00; Tuesday: 13:00 ~ 15:00; Thursday: 10:00 ~ 12:00)
(2) e-mail
(3) 視訊video

Expanding teaching and resources

The course corresponds to the SDGs SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI ● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）

Note
　

Instructor	Lin,Chun-Che　Office Hours
Email	cclin0530@ntut.edu.tw
Last Updated	2025-06-03 17:58:52
Course Objective	本課程分為三大重點：(1) 製程涵蓋：半導體基礎原理、晶圓製造、加熱製程、蝕刻製程、化學氣相沉積、金屬化製程、製程整合技術。(2) 分析涵蓋：晶相結構分析、奈米3D顯微形貌表面形態分析、原子力顯微鏡。(3) 業界講師共同授課並分享產業為來發展趨勢。 The course is divided into three main points: (1) The fabrication: basic principles of semiconductor, wafer manufacturing, heating process, etching process, chemical vapor deposition, metallization process, and process integration technology. (2) Analysis: crystal structure analysis, nano 3D micro-topography and surface morphology analysis, atomic force microscope. (3) Industry lecturers teach and share industry trends in the future.
Course Schedule	第1週 (9/8-9/12, 2025) 導論第2週 (9/15-9/19, 2025) 半導體分子材料-1 第3週 (9/22-9/26, 2025) 半導體分子材料-2 第4週 (9/29-10/3, 2025) 化學氣相沉積-1 第5週 (10/6-10/10, 2025) 化學氣相沉積-2 第6週 (10/13-10/17, 2025) 半導體製程與應用-1 第7週 (10/20-10/24, 2025) 半導體製程與應用-2 第8週 (10/27-10/31, 2025) 蝕刻製程-1 第9週 (11/3-11/7, 2025) Midterm exam 第10週 (11/10-11/14, 2025) 業界實務講習第11週 (11/17-11/21, 2025) 蝕刻製程-2 第12週 (11/24-11/28, 2025) 業界實務講習第13週 (12/1-12/5, 2025) 分析技術與應用-1 第14週 (12/8-12/12, 2025) 分析技術與應用-2 第15週 (12/15-12/19, 2025) 業界實務講習第16週 (12/22-12/26, 2025) 製程整合技術-1 第17週 (12/29-1/2, 2025) 製程整合技術-2 第18週 (1/5-1/9, 2026) Final Exam
Evaluation and grading policy	Midterm exam (40%) Final Exam (40%) Class attendance and homework (20%)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes 1. 半導體製造技術與管理 (簡富; 清華大學出版) 2. Handbook of Microscopy for Nanotechnology (N. Yao and Z. L. Wang; KLUWER ACADEMIC PUBLISHERS) 3. 業師自備課程
The access to curricular consultation	(1) 教師諮商時間Office Hours (Monday: 13:00 ~ 15:00; Tuesday: 13:00 ~ 15:00; Thursday: 10:00 ~ 12:00) (2) e-mail (3) 視訊video
Expanding teaching and resources
The course corresponds to the SDGs	SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI	● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）
Note