Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2026 359234 Thin Films Technology 1 3.0 3 ★ Chen,Po-Chun GMMR 13 0 EMI

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	359234	Thin Films Technology	1	3.0	3	★	Chen,Po-Chun	GMMR	13	0	EMI

Course Plan：

Instructor Chen,Po-Chun　Office Hours

Email cpc@mail.ntut.edu.tw

Last Updated 2026-01-05 14:51:45

Course Objective 薄膜科技是當今各式高科技製造業最不可或缺的技術之一，相關技術影響範疇包含電子、光電、半導體製造業、表面工程、高硬度高強度、耐磨抗腐蝕、裝飾與保護等等。薄膜技術種類與相關配合技術繁多，隨產業發展各項技術亦不斷進化，本課程涵蓋相關薄膜成長概論與原理，並搭配實作課程，期望讓學生認識薄膜在科技產業上的應用，並了解其重要性及未來的發展。本課程包含以下主題： 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization) Thin film science and technology have gone through a thorough development which results in numerous new materials and advanced applications. Thin film research shares the knowledge from multi-disciplines, such as materials science, chemistry, solid state physics, mechanics and etc.. This course is an introductory class for students who are interested in thin film technology. Lab or tour session(s) will be provided to promote teaching and learning. The topics will cover: 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization)

Course Schedule 1) Overview of thin film technology 2) Thin film deposition and layered structure 3) Surface energies 4) Diffusion in solids 5) Stress in thin films 6) Surface kinetic processes 7) Homo-epitaxy and hetero-epitaxy growth 8) Midterm exam 9) Interdiffusion in the films 10) Electromigration 11) Silicide formation and film reactions 12) Reaction in bulk material, thin films and nanowires 13)Term paper presentations 14)Special topics in thin films applications 15)Final review and Q&A Thin Film Lab Sessions (thin film deposition and property measurements)

Evaluation and grading policy Final Exam 30% Semester Project 30% Lab Assignments 20% Participation 20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
1. Handbook of Thin Film Deposition Processes and Techniques Principles, Methods, Equipment and Applications, Krisna Seshan, 2001 ISBN 978-0-8155-1442-8 (e-book @ NTUT) 2. Electronic Thin-Film Reliability, King-Ning Tu, Cambridge University Press, 2011 ISBN 978-0-5215-1613-6

The access to curricular consultation email: cpc@mail.ntut.edu.tw

The course corresponds to the SDGs SDG3：良好健康和福祉（Good Health and Well-being）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）

Does the course incorporate AI ● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process）

Note
17、18週上課方式
遠距上課 (Microsoft Teams)
email: cpc@mail.ntut.edu.tw

Instructor	Chen,Po-Chun　Office Hours
Email	cpc@mail.ntut.edu.tw
Last Updated	2026-01-05 14:51:45
Course Objective	薄膜科技是當今各式高科技製造業最不可或缺的技術之一，相關技術影響範疇包含電子、光電、半導體製造業、表面工程、高硬度高強度、耐磨抗腐蝕、裝飾與保護等等。薄膜技術種類與相關配合技術繁多，隨產業發展各項技術亦不斷進化，本課程涵蓋相關薄膜成長概論與原理，並搭配實作課程，期望讓學生認識薄膜在科技產業上的應用，並了解其重要性及未來的發展。本課程包含以下主題： 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization) Thin film science and technology have gone through a thorough development which results in numerous new materials and advanced applications. Thin film research shares the knowledge from multi-disciplines, such as materials science, chemistry, solid state physics, mechanics and etc.. This course is an introductory class for students who are interested in thin film technology. Lab or tour session(s) will be provided to promote teaching and learning. The topics will cover: 1. 薄膜沉積 (Thin film deposition) 2. 薄膜材料表面能、擴散行為、應力等介紹 (Review of surface energy, diffusion, and stress in thin films) 3. 薄膜的化學能與表面動態行為 (Chemical potentials and surface kinetic processes) 4. 同質磊晶與異質磊晶 (Homogenius epitaxy and heterogenius epitaxy growth) 5. 互擴散 (Interdiffusion) 6. 蕭基能障 (Schottky barrier) 7. 矽化物薄膜形成 (Silicide formation and thin film reaction) 8. 電遷移機制 (Electromigration) 9. 薄膜分析技術 (Thin film characterization)
Course Schedule	1) Overview of thin film technology 2) Thin film deposition and layered structure 3) Surface energies 4) Diffusion in solids 5) Stress in thin films 6) Surface kinetic processes 7) Homo-epitaxy and hetero-epitaxy growth 8) Midterm exam 9) Interdiffusion in the films 10) Electromigration 11) Silicide formation and film reactions 12) Reaction in bulk material, thin films and nanowires 13)Term paper presentations 14)Special topics in thin films applications 15)Final review and Q&A Thin Film Lab Sessions (thin film deposition and property measurements)
Evaluation and grading policy	Final Exam 30% Semester Project 30% Lab Assignments 20% Participation 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes 1. Handbook of Thin Film Deposition Processes and Techniques Principles, Methods, Equipment and Applications, Krisna Seshan, 2001 ISBN 978-0-8155-1442-8 (e-book @ NTUT) 2. Electronic Thin-Film Reliability, King-Ning Tu, Cambridge University Press, 2011 ISBN 978-0-5215-1613-6
The access to curricular consultation	email: cpc@mail.ntut.edu.tw
The course corresponds to the SDGs	SDG3：良好健康和福祉（Good Health and Well-being） SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
Does the course incorporate AI	● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process）
Note	17、18週上課方式遠距上課 (Microsoft Teams) email: cpc@mail.ntut.edu.tw