Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2026	367170	Fabrication Technology of Semiconductor Devices	1	3.0	3	★	Wen-Ya Lee	Special Needs Teaching Courses	34	0	新南向專班課程

Course Plan：

Instructor

Wen-Ya Lee　Office Hours

wenyalee@ntut.edu.tw

Last Updated

2026-09-05 23:01:31

Course Objective

半導體製造技術是近年來最關鍵的技術，本課程涵蓋了基於各種半導體製程知識以及先進元件發展，來協助學子進一步了解半導體的實際應用。(此課程為外國學生為主要上課學員，將以全英文教學進行)
Semiconductor manufacturing technology is one of the most advanced technologies in recent years. This course covers the knowledge of various semiconductor fabrication processes and advanced devices to help students further understand the practical applications of semiconductors.

Course Schedule
(Week 1-16)

Week 1: Introduction to the Semiconductor Industry Chain and Nanotechnology
Week 2: Semiconductor Physics
Week 3: Electrical fundamentals
Week 4: Semiconductor Manufacturing: Silicon Wafer
Week 5: Semiconductor Manufacturing: Oxidation and Diffusion
Week 6: Semiconductor Manufacturing: Photolithography
Week 7: Semiconductor Manufacturing: Ion Implantation and Plasma
Week 8: Semiconductor Manufacturing: Etching
Week 9: Midterm Exam
Week 10: Semiconductor Manufacturing: Chemical Vapor Deposition (CVD)
Week 11: Semiconductor Manufacturing: Metallization and Physical Vapor Deposition (PVD)
Week 12: Semiconductor Manufacturing: Chemical Mechanical Polishing (CMP)
Week 13: Semiconductor Manufacturing: Process Integration
Week 14: Advanced Semiconductor Devices
Week 15: Nanotechnology: Fullerene & Carbon nanotubes
Week 16: Nanotechnology: Graphene
Week 17: Nanotechnology: 2D Materials
Week 18: Final Exam

Flexible Learning
(Week 17-18)

Category	● 學生分組實作及討論(Student group practice and discussion) ● AI 輔助學習與工具應用(AI-assisted learning and tool application)
Content	Week 17: Self-Directed Learning: AI-Assisted Research on Advanced Semiconductor Processes Week 18: Self-Directed Learning: Student Group Discussion and Knowledge Integration
Hours	10
Learning Outcomes	Course Learning Outcomes: 1. Comprehend semiconductor physics and industry fundamentals. Analyze key fabrication processes (e.g., lithography, ion implantation, etching). 2. Use AI tools for self-directed research on advanced semiconductor devices. 3. Integrate and communicate technical knowledge through group discussions.
Assessment Percentage	Self-Directed Learning: 10%

Evaluation and grading policy

Attendance 10%
Class quiz 30%
Midterm 30%
Final report 30%

Materials

All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes

Introduction to Semiconductor Manufacturing Technology

by Hong Xiao (Author

The access to curricular consultation

Contact by email: wenyalee@mail.ntut.edu.tw

Expanding teaching and resources

● 混成學習 (Blended Learning)
課程結合實體授課與線上學習（同步視訊／非同步活動）。
Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities).

The course corresponds to the SDGs

SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI

● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process）

Note

SDG 3: Good health and well-being.
SDG 4: Quality education.
SDG 6: Clean water and sanitation.
SDG 7: Affordable and clean energy.
SDG 8: Decent work and economic growth.
SDG 9: Industry, innovation, and infrastructure.
SDG 11: Sustainable cities and communities.
SDG 12: Responsible consumption and production.
SDG 13: Climate action