Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2026	366375	Semiconductor Fabrication Technologies	1	3.0	3	★	Hsin-Hui Hu	ECE	4	0

Course Plan：

Instructor	Hsin-Hui Hu
Email	hhhu@ntut.edu.tw
Last Updated	2026-06-08 10:42:49
Course Objective	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental & Advanced 3D CMOS Process 3.Wafer Manufacturing 4.Cleanroom, Clean and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography 11.The Shift From 2D to 3D Semiconductor Technology
Course Schedule	單元主題 1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental & Advanced 3D CMOS Process 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography 11.The Shift From 2D to 3D Semiconductor Technology TCAD Simulation Practice Final Project
Evaluation and grading policy	Attendance (10%) Midterm (20%) Final Exam (30%) Final Project (40%)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes [1] James D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling”, 2000, Prentice Hall. [2] 吳永俊, “半導體製程與整合”, 滄海圖書 [3] Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, Prentice Hall [4]Stanley Wolf and Richard N. Tauber “Silicon Processing for the VLSI ERA, Volume1: Process Technology”, 1986, Lattice Press. [5] W. R. Runyan and K. E. Bean “Semiconductor Integrated Circuit Processing Technology”, 1990, Addison-Wesley. [6] James W. Mayer and Sylvanus S. Lau “Electronic Materials Science: For Integrated Circuits in SI and GaAs”, 1989, Prentice Hall.
The access to curricular consultation	課程諮詢管道: 可e-mail至: hhhu@ntut.edu.tw。
Expanding teaching and resources	● 混成學習 (Blended Learning) 課程結合實體授課與線上學習（同步視訊／非同步活動）。 Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities).
The course corresponds to the SDGs	無（None）
Does the course incorporate AI	● 無（None）
Note	1. 同學如有加退選簽核或課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製造技術]_班級_姓名。 2. 本課程因應疫情可能會調整授課內容、授課方式、評分項目與配分比例。如因疫情而暫停實體上課時，將使用Teams於原定上課時間遠距上課，細節將再另行公布。