Course Syllabus

Course Information：

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	354431	Semiconductor Processings	1	3.0	3	★	Hsin-Hui Hu	4EN3A 4EN3B	35	1	電子大三合開

Course Plan：

Instructor	Hsin-Hui Hu　Office Hours
Email	hhhu@ntut.edu.tw
Last Updated	2026-03-12 10:02:04
Course Objective	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography
Course Schedule (Week 1-16)	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Semiconductor Fundamental 4.Wafer Manufacturing 5.Cleanroom, Clearn and Gettering 6.Thermal Oxidation 7.Diffusion 8.Ion Implantation 9.Mid-term Exam 10.Etching 11.Deposition 12.Lithography 13.Lithography 14.上機實習 15.上機實習 16.上機實習 17.Final Exam 18.Final Project
Evaluation and grading policy	Attendance (20%) Exam (35%) Final Project (45%)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Textbook: [1]蕭宏, “半導體製程技術導論”, 全華圖書第五版, 2025/07 (譯自第三版初稿) [2]吳永俊, “半導體製程與整合”, 滄海圖書, 2023/10 Reference: [1] Hong Xiao, “Introduction to Semiconductor Manufacturing Technology, 2nd Edition”, 2012, Prentice Hall. (英文書第三版尚未出版) [2] James D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling”, 2000, Prentice Hall. [3] Stanley Wolf and Richard N. Tauber “Silicon Processing for the VLSI ERA, Volume1: Process Technology”, 1986, Lattice Press. [4] W. R. Runyan and K. E. Bean “Semiconductor Integrated Circuit Processing Technology”, 1990, Addison-Wesley. [5] James W. Mayer and Sylvanus S. Lau “Electronic Materials Science: For Integrated Circuits in SI and GaAs”, 1989, Prentice Hall.
The access to curricular consultation	同學如有課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製程]_班級_姓名，謝謝。
Expanding teaching and resources	● 混成學習 (Blended Learning) 課程結合實體授課與線上學習（同步視訊／非同步活動）。 Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities).
The course corresponds to the SDGs	無（None）
Does the course incorporate AI	● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
Note	1. 同學如有加退選簽核或課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製程]_班級_姓名。 2. 本課程因應疫情可能會調整授課內容、授課方式、評分項目與配分比例。如因疫情而暫停實體上課時，將使用Teams於原定上課時間遠距上課，細節將再另行公布。