Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2025 345594 Semiconductor Processings 1 3.0 3 ★ Hsin-Hui Hu 4EN3A
4EN3B 22 0 電子大三合開

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2025	345594	Semiconductor Processings	1	3.0	3	★	Hsin-Hui Hu	4EN3A 4EN3B	22	0	電子大三合開

Course Plan：

Instructor Hsin-Hui Hu　Office Hours

Email hhhu@ntut.edu.tw

Last Updated 2024-12-17 13:47:50

Course Objective 1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography

Course Schedule 1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Semiconductor Fundamental 4.Wafer Manufacturing 5.Cleanroom, Clearn and Gettering 6.Thermal Oxidation 7.Diffusion 8.Ion Implantation 9.Mid-term Exam 10.Etching 11.Deposition 12.Lithography 13.Lithography 14.上機實習 15.上機實習 16.上機實習 17.Final Exam 18.Final Project

Evaluation and grading policy Attendance (10%) Mid-term Exam (20%) Final Exam (30%) Final Project (40%)

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
[1] Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, 2000, Prentice Hall [2] 吳永俊/孫崇哲/顏孝丞等著, “半導體製程與整合”, 2023, 滄海圖書 [3]James D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling”, 2000, Prentice Hall. [4] Stanley Wolf and Richard N. Tauber “Silicon Processing for the VLSI ERA, Volume1: Process Technology”, 1986, Lattice Press. [5] W. R. Runyan and K. E. Bean “Semiconductor Integrated Circuit Processing Technology”, 1990, Addison-Wesley.

The access to curricular consultation 同學如有課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製程]_班級_姓名，謝謝。

The course corresponds to the SDGs 無（None）

Does the course incorporate AI

Note
1. 同學如有加退選簽核或課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製程]_班級_姓名。
2. 本課程因應疫情可能會調整授課內容、授課方式、評分項目與配分比例。如因疫情而暫停實體上課時，將使用Teams於原定上課時間遠距上課，細節將再另行公布。

Instructor	Hsin-Hui Hu　Office Hours
Email	hhhu@ntut.edu.tw
Last Updated	2024-12-17 13:47:50
Course Objective	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Wafer Manufacturing 4.Cleanroom, Clearn and Gettering 5.Thermal Oxidation 6.Diffusion 7.Ion Implantation 8.Etching 9.Deposition 10.Lithography
Course Schedule	1.Introduction to Semiconductor Engineering 2.Semiconductor Fundamental 3.Semiconductor Fundamental 4.Wafer Manufacturing 5.Cleanroom, Clearn and Gettering 6.Thermal Oxidation 7.Diffusion 8.Ion Implantation 9.Mid-term Exam 10.Etching 11.Deposition 12.Lithography 13.Lithography 14.上機實習 15.上機實習 16.上機實習 17.Final Exam 18.Final Project
Evaluation and grading policy	Attendance (10%) Mid-term Exam (20%) Final Exam (30%) Final Project (40%)
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes [1] Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, 2000, Prentice Hall [2] 吳永俊/孫崇哲/顏孝丞等著, “半導體製程與整合”, 2023, 滄海圖書 [3]James D. Plummer, M. D. Deal, and P. B. Griffin, “Silicon VLSI Technology-Fundamentals, Practice and Modeling”, 2000, Prentice Hall. [4] Stanley Wolf and Richard N. Tauber “Silicon Processing for the VLSI ERA, Volume1: Process Technology”, 1986, Lattice Press. [5] W. R. Runyan and K. E. Bean “Semiconductor Integrated Circuit Processing Technology”, 1990, Addison-Wesley.
The access to curricular consultation	同學如有課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製程]_班級_姓名，謝謝。
The course corresponds to the SDGs	無（None）
Does the course incorporate AI
Note	1. 同學如有加退選簽核或課程問題請email給我 hhhu@ntut.edu.tw，信件標題 [半導體製程]_班級_姓名。 2. 本課程因應疫情可能會調整授課內容、授課方式、評分項目與配分比例。如因疫情而暫停實體上課時，將使用Teams於原定上課時間遠距上課，細節將再另行公布。