Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Spring Semester
Year 2026 357468 Advanced high-tech factory system 1 3.0 3 ★ Lin,Ti
SHIH-CHENG HU 半導體學位學程 11 0 半導體碩班

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Spring Semester Year 2026	357468	Advanced high-tech factory system	1	3.0	3	★	Lin,Ti SHIH-CHENG HU	半導體學位學程	11	0	半導體碩班

Course Plan：

Instructor SHIH-CHENG HU　Office Hours

Email f10870@ntut.edu.tw

Last Updated 2025-12-18 17:30:39

Course Objective 本課程主要介紹高階製程1.流體機械與流體輸送，2.製冷系統與供熱系統，3.壓縮空氣4.真空系統，5.冷卻與給水系統，6.排氣系統與空污防治設備，7.純水系統，8.化學品供應系統與大宗氣體供應系統，9.汽電共生，10.廠務節能措施，11. 案例分析與討論專案模擬。 This course mainly introduces the advanced process 1. Fluid machinery and fluid transportation, 2. Refrigeration system and heating system, 3. Compressed air system 4. Vacuum system, 5. Cooling and water supply system, 6. Exhaust system and air pollution control equipment, 7. Pure water system, 8. Chemical supply system and bulk gas supply system, 9. Steam-electricity symbiosis, 10. Factory energy saving measures, 11. Case analysis and discussion project simulation.

Course Schedule 週次授課日期時數授課內容 1 2.19 3 廠務系統課程介紹 2 2.26 3 一般排氣與除塵系統 3 3.05 3 化學品供應系統 4 3.12 3 大宗氣體供應系統 5 3.19 3 潔淨室之氣態化學污染物的控制 6 3.26 3 熱流學 7 4.02 3 流體機械與流體輸送 8 4.09 3 潔淨室檢測器具使用與規範 9 4.16 3 消防系統-潔淨室火災 10 4.23 3 Mid term exam 11 4.30 3 潔淨室不均勻分布計算理論 12 5.07 3 壓縮空氣與真空系統 13 5.14 3 製冷系統與供熱系統 14 5.21 3 以統計分析粒子的移動軌跡來評估亂流型無塵室之通風性能 15 5.28 3 潔淨室熱負荷計算 16 6.04 3 壓縮機原理與控制 17 6.11 3 廠務節能措施 18 6.18 3 Final exam

Evaluation and grading policy Mid term exam 30% Final exam 30% Participation 20% Homework 20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
High Facility system by DT Yan Cleanroom design by W. White

The access to curricular consultation 電子信箱： f10870@ntut.edu.tw

Expanding teaching and resources

The course corresponds to the SDGs SDG6：潔淨水與衛生（Clean Water and Sanitation）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）

Does the course incorporate AI ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）

Note
●上課方式: in person

Instructor	SHIH-CHENG HU　Office Hours
Email	f10870@ntut.edu.tw
Last Updated	2025-12-18 17:30:39
Course Objective	本課程主要介紹高階製程1.流體機械與流體輸送，2.製冷系統與供熱系統，3.壓縮空氣4.真空系統，5.冷卻與給水系統，6.排氣系統與空污防治設備，7.純水系統，8.化學品供應系統與大宗氣體供應系統，9.汽電共生，10.廠務節能措施，11. 案例分析與討論專案模擬。 This course mainly introduces the advanced process 1. Fluid machinery and fluid transportation, 2. Refrigeration system and heating system, 3. Compressed air system 4. Vacuum system, 5. Cooling and water supply system, 6. Exhaust system and air pollution control equipment, 7. Pure water system, 8. Chemical supply system and bulk gas supply system, 9. Steam-electricity symbiosis, 10. Factory energy saving measures, 11. Case analysis and discussion project simulation.
Course Schedule	週次授課日期時數授課內容 1 2.19 3 廠務系統課程介紹 2 2.26 3 一般排氣與除塵系統 3 3.05 3 化學品供應系統 4 3.12 3 大宗氣體供應系統 5 3.19 3 潔淨室之氣態化學污染物的控制 6 3.26 3 熱流學 7 4.02 3 流體機械與流體輸送 8 4.09 3 潔淨室檢測器具使用與規範 9 4.16 3 消防系統-潔淨室火災 10 4.23 3 Mid term exam 11 4.30 3 潔淨室不均勻分布計算理論 12 5.07 3 壓縮空氣與真空系統 13 5.14 3 製冷系統與供熱系統 14 5.21 3 以統計分析粒子的移動軌跡來評估亂流型無塵室之通風性能 15 5.28 3 潔淨室熱負荷計算 16 6.04 3 壓縮機原理與控制 17 6.11 3 廠務節能措施 18 6.18 3 Final exam
Evaluation and grading policy	Mid term exam 30% Final exam 30% Participation 20% Homework 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No High Facility system by DT Yan Cleanroom design by W. White
The access to curricular consultation	電子信箱： f10870@ntut.edu.tw
Expanding teaching and resources
The course corresponds to the SDGs	SDG6：潔淨水與衛生（Clean Water and Sanitation） SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
Does the course incorporate AI	● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools） ● 簡單介紹AI的基本概念（Briefly introduce the basic concept of AI）
Note	●上課方式: in person