Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Fall Semester
Year 2025 350598 Clean room design 1 3.0 3 ★ Lin,Ti
SHIH-CHENG HU 半導體學位學程 21 3 　

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2025	350598	Clean room design	1	3.0	3	★	Lin,Ti SHIH-CHENG HU	半導體學位學程	21	3

Course Plan：

Instructor SHIH-CHENG HU　Office Hours

Email f10870@ntut.edu.tw

Last Updated 2025-05-27 18:26:05

Course Objective 本課程包含下列課題 1.空氣清淨機構理論。 2.無塵室構造、建造及確效。 3.空氣過濾理論。 4.無塵室設計專案。 5. 論文研讀。 This course covers the following Topics. 1.Theory of air cleaning Mechanism. 2.Clean room configuration, construction and verification. 3.Air filtration theory. 4.Paper discussion.

Course Schedule Cleanroom history and application (2 hrs) Design criteria of industrial and bio cleanrooms (2 hrs) Ventilation theory for cleanroom(4 hrs) HVAC theory for cleanroom(6 hrs) Mid-term exam(3 hrs). Facility system – nine sub-system(6 hrs) Utility system – gas, water, power etc. (3 hrs) Airborne molecular contamination – influence, testing, and solution(3 hrs) Cleanroom testing, adjustment and balancing(3 hrs) Cleanroom verification (3 hrs) Final design project (9 hrs)

Evaluation and grading policy Mid term exam 30% Final eaxm 30% participation 20%. homework 20%

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:No
Textbook(s) and References: 1. Handout provided by the instructor. 2. Cleanroom Technology, Fundamental of design, testing and operation By W Whyte, John Wiley and Sons., Ltd. 3. Aerosol Science and Technology, 2nd edition, By W. Hinds, John Willey 4 Refereed Journal Papers

The access to curricular consultation 綜科B12
please have a google meeting (email: schu.ntut@gmail.com) with me or Line talk with me (line id: schu.ntut)

Expanding teaching and resources

The course corresponds to the SDGs SDG1：消除貧窮（No Poverty）
SDG3：良好健康和福祉（Good Health and Well-being）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG11：永續城市與社區（Sustainable Cities and Communities）
SDG12：負責任的消費與生產（Responsible Consumption and Production）

Does the course incorporate AI ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）

Note
　

Instructor	SHIH-CHENG HU　Office Hours
Email	f10870@ntut.edu.tw
Last Updated	2025-05-27 18:26:05
Course Objective	本課程包含下列課題 1.空氣清淨機構理論。 2.無塵室構造、建造及確效。 3.空氣過濾理論。 4.無塵室設計專案。 5. 論文研讀。 This course covers the following Topics. 1.Theory of air cleaning Mechanism. 2.Clean room configuration, construction and verification. 3.Air filtration theory. 4.Paper discussion.
Course Schedule	Cleanroom history and application (2 hrs) Design criteria of industrial and bio cleanrooms (2 hrs) Ventilation theory for cleanroom(4 hrs) HVAC theory for cleanroom(6 hrs) Mid-term exam(3 hrs). Facility system – nine sub-system(6 hrs) Utility system – gas, water, power etc. (3 hrs) Airborne molecular contamination – influence, testing, and solution(3 hrs) Cleanroom testing, adjustment and balancing(3 hrs) Cleanroom verification (3 hrs) Final design project (9 hrs)
Evaluation and grading policy	Mid term exam 30% Final eaxm 30% participation 20%. homework 20%
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:No Textbook(s) and References: 1. Handout provided by the instructor. 2. Cleanroom Technology, Fundamental of design, testing and operation By W Whyte, John Wiley and Sons., Ltd. 3. Aerosol Science and Technology, 2nd edition, By W. Hinds, John Willey 4 Refereed Journal Papers
The access to curricular consultation	綜科B12 please have a google meeting (email: schu.ntut@gmail.com) with me or Line talk with me (line id: schu.ntut)
Expanding teaching and resources
The course corresponds to the SDGs	SDG1：消除貧窮（No Poverty） SDG3：良好健康和福祉（Good Health and Well-being） SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG11：永續城市與社區（Sustainable Cities and Communities） SDG12：負責任的消費與生產（Responsible Consumption and Production）
Does the course incorporate AI	● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
Note