Course Syllabus

Course Information：

Year-Semester Course Number Course Name Phase Credits Hours Required/Elective Instructor Class Student NO. Withdraw Note

Fall Semester
Year 2026 366161 Characterization Methods for Semiconductor Materials 1 3.0 3 ★ CHUNG-KUANG YANG GCEB
半導體學位學程
IDEOM 0 0 EMI化工所、EOMP和創新半導體合開；網路預選限15人

Year-Semester	Course Number	Course Name	Phase	Credits	Hours	Required/Elective	Instructor	Class	Student NO.	Withdraw	Note
Fall Semester Year 2026	366161	Characterization Methods for Semiconductor Materials	1	3.0	3	★	CHUNG-KUANG YANG	GCEB 半導體學位學程 IDEOM	0	0	EMI化工所、EOMP和創新半導體合開；網路預選限15人

Course Plan：

Instructor CHUNG-KUANG YANG

Email ckyang@ntut.edu.tw

Last Updated 2026-06-05 17:24:43

Course Objective This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials.

Course Schedule 1-3 : X-ray diffraction (XRD) analysis and its theory fundamentals 4-6 : Scanning Electron Microscope (SEM) analysis and its theory fundamentals 7-9 : Atomic Force Microscope (AFM) analysis and its theory fundamentals 10-11 : Raman spectroscopy analysis and its theory fundamentals 12-13 : Fourier-Transform Infrared Spectroscopy (FTIR) analysis and its theory fundamentals 14-17 : Theory and the applications of x-ray photoelectron spectroscopy (XPS) 18: Practice and results discussion

Evaluation and grading policy 45% Midterm exam 45% Final examination 10% Reports

Materials All right reserved. Do not reproduce without permission.

Foreign-language textbooks:Yes
Surface analysis-the principal technique, Vickerman, 2010

The access to curricular consultation please use the link to Microsoft Team displayed in the course systems.

Expanding teaching and resources ● 混成學習 (Blended Learning)
課程結合實體授課與線上學習（同步視訊／非同步活動）。
Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities).
● 數位科技融入 (Digital Technology Integration)
運用生成式AI、VR/AR、IoT、IRS等新興科技輔助教學與評量。
Utilizes emerging technologies such as Generative AI, VR/AR, IoT, and IRS (Interactive Response Systems) to facilitate teaching and assessment.

The course corresponds to the SDGs SDG1：消除貧窮（No Poverty）
SDG2：消除飢餓（Zero Hunger）
SDG3：良好健康和福祉（Good Health and Well-being）
SDG4：優質教育（Quality Education）
SDG7：可負擔的潔淨能源（Affordable and Clean Energy）
SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth）
SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure）
SDG10：減少不平等（Reduced Inequalities）
SDG11：永續城市與社區（Sustainable Cities and Communities）
SDG12：負責任的消費與生產（Responsible Consumption and Production）
SDG17：夥伴關係（Partnerships for the Goals）

Does the course incorporate AI ● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process）
● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）

Note
please use the link to Microsoft Team displayed in the course systems.

Instructor	CHUNG-KUANG YANG
Email	ckyang@ntut.edu.tw
Last Updated	2026-06-05 17:24:43
Course Objective	This course will present the techniques and their corresponding theories on the surface property measurements including chemical information, stress analysis, morphology, crystalline structure and intermolecular forces between interfaces. The course also includes a practical training on the FTIR microscope, atomic force microscope, reology meter on the semiconductor materials.
Course Schedule	1-3 : X-ray diffraction (XRD) analysis and its theory fundamentals 4-6 : Scanning Electron Microscope (SEM) analysis and its theory fundamentals 7-9 : Atomic Force Microscope (AFM) analysis and its theory fundamentals 10-11 : Raman spectroscopy analysis and its theory fundamentals 12-13 : Fourier-Transform Infrared Spectroscopy (FTIR) analysis and its theory fundamentals 14-17 : Theory and the applications of x-ray photoelectron spectroscopy (XPS) 18: Practice and results discussion
Evaluation and grading policy	45% Midterm exam 45% Final examination 10% Reports
Materials	All right reserved. Do not reproduce without permission. Foreign-language textbooks:Yes Surface analysis-the principal technique, Vickerman, 2010
The access to curricular consultation	please use the link to Microsoft Team displayed in the course systems.
Expanding teaching and resources	● 混成學習 (Blended Learning) 課程結合實體授課與線上學習（同步視訊／非同步活動）。 Combines face-to-face instruction with online learning (including synchronous video sessions or asynchronous activities). ● 數位科技融入 (Digital Technology Integration) 運用生成式AI、VR/AR、IoT、IRS等新興科技輔助教學與評量。 Utilizes emerging technologies such as Generative AI, VR/AR, IoT, and IRS (Interactive Response Systems) to facilitate teaching and assessment.
The course corresponds to the SDGs	SDG1：消除貧窮（No Poverty） SDG2：消除飢餓（Zero Hunger） SDG3：良好健康和福祉（Good Health and Well-being） SDG4：優質教育（Quality Education） SDG7：可負擔的潔淨能源（Affordable and Clean Energy） SDG8：尊嚴就業與經濟發展（Decent Work and Economic Growth） SDG9：產業創新與基礎設施（Industry, Innovation and Infrastructure） SDG10：減少不平等（Reduced Inequalities） SDG11：永續城市與社區（Sustainable Cities and Communities） SDG12：負責任的消費與生產（Responsible Consumption and Production） SDG17：夥伴關係（Partnerships for the Goals）
Does the course incorporate AI	● 使用生成式AI作為教學過程的輔助工具（Use generative AI tools as an aid to the teaching process） ● 鼓勵學生使用生成式AI工具（Encourage students to use generative AI tools）
Note	please use the link to Microsoft Team displayed in the course systems.