| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 6605003 | Fabrication Technologies of Integrated Circuits | 3.0 | 3 |
| Description | In this lecture, the following topics will be introduced: 1. Operating modes and theory of MOS devices. 2. Small-geometry effects. 3. Analysis for CMOS circuits. 4. Wafer growth. 5. Diffusion. 6. Ion implantation. 7. Oxidation. 8. CVD techniques. 9. Lithography. 10. Sputtering and evaporation. 11. Photo masking. 12. CMOS IC fabrication processing. | ||