Course Description

Course CodeCourse NameCreditsHours
6505148 Introduction to semiconductor manufacturing technology 3.0 3
Description Introduction、Introduction to IC Fabrication、Semiconductor Basics、 Wafer Manufacturing、Thermal Processes、Photolithography and Etch、 Plasma Basics、Ion Implantation、CVD and Dielectric Thin Film、 Metallization、CMP 、Process Integration、CMOS Processes