Course Code | Course Name | Credits | Hours |
---|---|---|---|
6505148 | Introduction to semiconductor manufacturing technology | 3.0 | 3 |
Description | Introduction、Introduction to IC Fabrication、Semiconductor Basics、 Wafer Manufacturing、Thermal Processes、Photolithography and Etch、 Plasma Basics、Ion Implantation、CVD and Dielectric Thin Film、 Metallization、CMP 、Process Integration、CMOS Processes |