| Course Code | Course Name | Credits | Hours |
|---|---|---|---|
| 6505054 | Epitaxy technology and measurement | 3.0 | 3 |
| Description | (1) Lattice structure (2) Liquid phase epitaxy(3) Vapor phase epitaxy (4) Matel-organic chemical vapor deposition (5) Molecular beam epitaxy (6) measuring technology of epilayer | ||