||This subject is arranged to introduce the advanced systems and technology associated with micro- and nano-scale measurement. The subject includes the following subtopics:
1.Modern opto-electro measurement systems and techniques
2.Statistic principles for measurement
3.Signal processing techniques
4.Three-dimensional measurement systems and techniques
5.Laser interferometric metrology and systems
6.Image processing techniques for metrology
7.Micro and nano-measurement systems and techniques (I) - Moire interferometry, phase shifting, signal modulation, confocal and auto-focusing techniques.
8.Micro- and nano-measurement systems and techniques (II) - SPM, STM, AFM and SNOM.
9.Nano-particle measurement systems and techniques
11.Team project work for design and fabrication of small-scaled measurement instrument