| Description
| This advanced course aims to provide students a broad scope of hand-on knowledge on the facility system of a semiconductor or photonic fabrication factory. The facility system includes nine sub-systems: chilled water system, exhaust air system, compressed air system, process cooling water (PCW) system, vacuum system, ultra pure water (UPW) system, power and monitoring system, nitrogen system and make-up air system. Course material is basically based on and closely linked with field operational experience. A factory visit tour will be arranged. A mini-project will be carried by participating students.
|
|---|