| Description
| The vacuum technology and industry are growing fast in the past two decades because of the highly growing of the high-tech industries including semiconductor, flat panel displayer, optics-electrics, thin film, cryogenic, solar energy, material, and biotechnology. The course will introduce the basic vacuum technology and the newly vacuum equipment and related vacuum components widely used in modern high-tech industrials. The contents of the course are basic vacuum technology, vacuum pump, vacuum gauge, material and component, pumping system, leak detection, and applications of vacuum technology.
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