Course Description

Course CodeCourse NameCreditsHours
4504907 Vacuum Facilites 3.0 3
Description The vacuum industry is growing fast in the past two decades because of the highly growing of the high-tech industries including semiconductor, optics-electrics, communication, MEMS, and nano-technology. Therefore, a lot of students need to know the vacuum system described previously. This program will introduce vacuum systems including vacuum evaporating system, vacuum sputtering system, vacuum drying system, vacuum plasma etching system, surface analysis.